# US 5,352,914 A · Field-effect transistor with structure for suppressing hot-electron effects, and method of fabricating the transistor

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- Number: US 5,352,914 A
- Document ID: US5352914A
- Status: Granted
- Kind: A
- Application number: 07/923,675
- Filed: 1992-08-03
- Granted: 1994-10-04
- Earliest claimed: 1992-08-03
- Assignees: Hughes Aircraft Company
- Inventors: Joseph E. Farb
- Web page: https://patentgrep.com/patent/US5352914A

## CPC

- H10D 64/671: {the conductor having lateral variation in doping or structure}
- H10D 30/0227: {having both lightly-doped source and drain extensions and source and drain regions self-aligned to the sides of the gate, e.g. lightly-doped drain [LDD] MOSFET or double-diffused drain [DDD] MOSFET}
- H10D 62/371: {Inactive supplementary semiconductor regions, e.g. for preventing punch-through, improving capacity effect or leakage current}
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES

## Abstract

A polysilicon gate (42) of an N-channel MOSFET (40) includes a P+ doped central portion (42a), and N+ doped lateral portions (42b,42c) which face an N-type source (24c) and drain (26c) respectively. An N-type dopant is implanted into the surface portion of a P-type channel region (18) to reduce the surface doping and adjust the transistor threshold voltage to approximately 0.8 volts. The lowered channel doping reduces the electric field at the drain (26c) and suppresses injection of hot electrons from the drain (26c) into the gate oxide (14), and also reduces the electric field across the gate oxide (14) and suppresses charging thereof by hot electrons. N-type and P-type graded strata (26a,26b) are formed between the drain (26c) and substrate (12) and create two reverse biased diode junctions which block flow of drain current from the channel region (18), thereby eliminating the creation of hot electrons and impact ionization in the bulk portion of the drain diode, and channel charge carriers through the surface portion of the channel region (18). The surface portions of the channel region (18), drain (26c) and graded strata (26a,26b) are shorted together to form a shorting surface channel through which the charge carriers are constrained to flow.

## Claims

### Claim 1

A field-effect transistor, comprising:
a semiconductor substrate of a first conductivity type;
a channel region having a surface portion;
a source and a drain formed in the substrate on opposite sides of the channel region respectively, said source and said drain being of a second conductivity type;
gate means formed over the channel region; and
carrier channeling means for urging charge carriers to flow between the source and the drain only through said surface portion of the channel region, wherein said carrier channeling means comprises dopant strata formed between said drain and said substrate for blocking flow of drain current, said dopant strata comprises:
a first doped stratum of said second conductivity type located between the drain and the substrate which has a lower dopant concentration than the drain; and
a second doped stratum of said first conductivity type located to completely separate said drain from said first doped stratum, said first doped stratum and said second doped stratum forming two reverse biased diode junctions, wherein the gate means comprises:
a gate oxide layer formed over the channel region; and
a polysilicon gate formed over the gate oxide layer, the polysilicon gate including:
a central portion of the first conductivity type, and
first and second lateral portions of the second conductivity type which are adjacent to said central portion, said first lateral portion being spaced from said source and said second lateral portion being spaced from said drain; and wherein
the carrier channeling means further comprises:
a dopant of the second conductivity type incorporated into said surface portion of said channel region and extending laterally substantially under said polysilicon gate for adjusting the threshold voltage of said channel region substantially under said central portion of said polysilicon gate to a first predetermined value for enhancement mode operation and for adjusting the threshold voltage of said channel region substantially under said first and second lateral portions of said polysilicon gate to a second predetermined value for depletion mode operation, wherein said channel region under said first and second lateral portions is constantly electrically conductive for urging charge carriers to flow between said surface portion of said channel region and said drain.

### Claim 2 (depends on 1)

A transistor as in claim 1, in which the first conductivity type is P-type and the second conductivity type is N-type.

### Claim 3 (depends on 2)

A transistor as in claim 2, in which said dopant has a concentration of approximately 10.sup.16 -10.sup.18 ions/cm.sup.3.

### Claim 4 (depends on 3)

A transistor as in claim 3, in which said dopant comprises a material selected from the group consisting of phosphorous and arsenic.

### Claim 5

A field-effect transistor, comprising:
a semiconductor substrate of a first conductivity type;
a channel region having a surface portion;
a source and a drain formed in the substrate on opposite sides of the channel region respectively, said source and said drain being of a second conductivity type;
gate means formed over the channel region; and
carrier channeling means for urging charge carriers to flow between the source and the drain only through said surface portion of the channel region, wherein said carrier channeling means comprises dopant strata formed between said drain and said substrate for blocking flow of drain current, said dopant strata comprises:
a first doped stratum of said second conductivity type located between the drain and the substrate which has a lower dopant concentration than the drain; and
a second doped stratum of said first conductivity type located to completely separate said drain from said first doped stratum, said first doped stratum and said second doped stratum forming two reverse biased diode junctions wherein the gate means comprises:
a gate oxide layer formed over the channel region; and
a polysilicon gate formed over the gate oxide layer; and wherein the carrier channeling means further comprises:
a dopant of the second conductivity type incorporated into said surface portion of said channel region for adjusting the threshold voltage of said channel region to a first predetermined value for enhancement mode operation and for adjusting the threshold voltage of said channel region to a second predetermined value for depletion mode operation; and
a third doped stratum of said second conductivity type which extends substantially from said surface portion of said channel region through said first and said second doped strata to said drain, wherein said third doped stratum is constantly electrically conductive for urging charge carriers to flow between said surface portion of said channel region and said drain.

### Claim 6 (depends on 5)

A transistor as in claim 5, in which the first conductivity type is P-type and the second conductivity type is N-type.

### Claim 7 (depends on 6)

A transistor as in claim 6, in which:
the first doped strata has a dopant concentration of approximately 10.sup.18 -10.sup.21 ions/cm.sup.3 ;
the second doped strata has approximately two-thirds the dopant concentration of the first doped strata; and
the third doped strata has a dopant concentration of approximately 10.sup.16 -10.sup.18 ions/cm.sup.3.

### Claim 8 (depends on 5)

A transistor as in claim 5, in which the first doped strata has a dopant concentration which decreases from the second doped strata toward the substrate.

### Claim 9 (depends on 5)

A transistor as in claim 5, in which the second doped strata has a dopant concentration which decreases from the drain toward the first doped strata.

### Claim 10 (depends on 5)

A transistor as in claim 5, in which the carrier channeling means further comprises:
a fourth doped strata of the second conductivity type which is formed between the source and the substrate and has a lower dopant concentration than the source;
a fifth doped strata of the first conductivity type which is formed between the source and the fourth doped strata; and
a sixth doped strata of the second conductivity type which extends substantially from said surface portion through the fourth and fifth doped strata to the source.