Electron spectroscopy analyzer and a method of correcting a shift of spectral line in electron spectroscopy
AssigneeSharp Kabushiki Kaisha
InventorFumitoshi Yasuo
Life of this patent
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Abstract
In an electron spectroscopy analyzer for obtaining an electron spectroscopy spectrum by applying to a sample an X-ray or electron beam from a first beam source and by analyzing the energy of secondary electrons emitted from the sample, an amount of energy shift of a reflected beam from the sample is obtained by applying a charging beam from second beam source, and a shift of the electron spectroscopy spectrum is corrected in accordance with the amount of energy shift. With this structure, a shift of a spectral line due to charges on the sample surface caused by the application of the X-ray or electron beam is corrected, thereby improving accuracy of the measurement of values and intensity of energy.
Claims19
An electron spectroscopy analyzer comprising:
- a first beam source for causing a sample to emit analytical secondary electrons by applying a main beam to said sample;
- spectrum detecting means for detecting an electron spectroscopy spectrum by analyzing an energy of said analytical secondary electrons;
- a second beam source for applying to said sample a charging beam having an energy lower than an energy of said main beam;
- and
- shift detecting means for detecting an amount of an energy shift of a reflected beam produced by said charging beam.
A method of correcting a shift of a spectral line in electron spectroscopy comprising the steps of:
- (1) detecting an amount of an energy shift of a reflected beam from a sample when a charging beam is applied to said sample;
- and
- (2) correcting a shift of a spectral line in electron spectroscopy of analytical secondary electrons emitted from said sample when a main beam is applied to said sample, in accordance with the amount of the energy shift.
Dependencies are inferred from the claim text.