# US 5,352,630 A · Method for forming inter-metal dielectrics in a semiconductor device

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- Number: US 5,352,630 A
- Document ID: US5352630A
- Status: Granted
- Kind: A
- Application number: 07/956,853
- Filed: 1992-10-02
- Granted: 1994-10-04
- Earliest claimed: 1991-10-10
- Assignees: Samsung Electronics Co., Ltd.
- Inventors: Chang-Gyu Kim; Ji-Hyun Choi
- Web page: https://patentgrep.com/patent/US5352630A

## CPC

- H10P 14/69215: {the material being a silicon oxide, e.g. SiO2}
- H10P 14/6334: {using decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition (deposition by physical ablation of a target H10P14/6329)}
- H10P 14/6506: {Formation of intermediate materials}
- H10P 95/06: {Planarisation of inorganic insulating materials}
- H10W 20/075: {of multilayered thin functional dielectric layers}
- H10W 20/077: {on sidewalls or on top surfaces of conductors (H10W20/076 takes precedence)}
- H10W 20/092: {by smoothing the dielectric parts}
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10

## Abstract

A method for forming an inter-metal dielectrics in a semiconductor device includes the steps of sequentially forming a first and second insulating layers over a semiconductor substrate with a patterned metal layers, etching-back the second insulating layer so as to form second insulating spacers over the side walls of the first insulating layer, and growing a third insulating layer over the first and second insulating layers, the growing speed of the third insulating layer being different from the region over the first insulating layer to the region over the second insulating layer.

## Claims

### Claim 1

A method for forming a planarized dielectric layer on a structure comprised of a semiconductor substrate and a patterned conductive layer formed thereon, whereby the topology of the structure consists of raised surface features defining recesses therebetween, the method comprising the steps of:
forming a first insulating layer on said structure;
forming a second insulating layer on said first insulating layer;
etching back said second insulating layer to remove portions of said second insulating layer disposed on said first insulating layer and above said raised surface features, but without removing any of said first insulating layer, to thereby expose portions of said first insulating layer disposed on said raised surface features and to leave remaining portions of said second insulating layer in said recesses; and,
depositing a third insulating layer on said exposed portions of said first insulating layer at a first deposition rate, and depositing said third insulating layer within said recesses at a second deposition rate, wherein the difference between said first and second deposition rates is such as to result in the upper surface of said third insulating layer having a substantially flat profile.

### Claim 2 (depends on 1)

The method as set forth in claim 1, wherein said first insulating layer is a material selected from a group consisting of PSG, O.sub.3 --TEOS PSG, O.sub.3 --TEOS BPSG, and P--TEOS undoped silicated glass.

### Claim 3 (depends on 2)

The method as set forth in claim 2, wherein said second insulating layer is a material selected from a group consisting of plasma-enhanced silane undoped silicate glass and O.sub.3 --TEOS undoped silicate glass.

### Claim 4 (depends on 3)

The method as set forth in claim 3, wherein said third insulating layer is comprised of O.sub.3 --TEOS undoped silicate glass.

### Claim 5

A method for forming a planarized dielectric layer on a structure comprised of a semiconductor substrate and a patterned conductive layer formed thereon, whereby the topology of the structure consists of a raised surface features defining recesses therebetween, the method comprising the steps of:
forming a first insulating layer on said structure;
forming a second insulating layer on said first insulating layer;
applying a sacrificial layer on said second insulating layer;
etching back said sacrificial layer to expose portions of said second insulating layer disposed above said raised surface features, thereby leaving remaining portions of said sacrificial layer in said recesses;
removing said exposed portions of said second insulating layer by using said remaining portions of said sacrificial layer as a mask, to thereby expose portions of said first insulating layer disposed on said raised surface features;
removing said remaining portions of said sacrificial layer; and,
depositing a third insulating layer on said exposed portions of said first insulating layer at a first deposition rate, and
depositing said third insulating layer within said recesses at a second deposition rate, wherein the difference between said first and second deposition rates is such as to result int he upper surface of said third insulating layer having a substantially flat profile.

### Claim 6 (depends on 5)

The method ass et forth in claim 5, wherein said sacrificial layer is comprised of a photoresist material.

### Claim 7 (depends on 5)

The method as set forth in claim 5, wherein said sacrificial layer is comprised of spin-on-glass.

### Claim 8 (depends on 5)

The method as set forth in claim 5, wherein said first insulating layer is a material selected from a group consisting of PSG, O.sub.3 --TEOS PSG, O.sub.3 --TEOS BPSG, and P-TEOS undoped silicated glass.

### Claim 9 (depends on 8)

The method as set forth in claim 8, wherein said second insulating layer is a material selected from a group consisting of plasma-enhanced silane undoped silicate glass and O.sub.3 --TEOS undoped silicate glass.

### Claim 10 (depends on 9)

The method as set forth in claim 9, wherein said third insulating layer is comprised of O.sub.3 --TEOS undoped silicate glass.

### Claim 11 (depends on 1)

The method as set forth in claim 1, wherein said etching back step is carried out by using an anisotropic etching process, to thereby leave remaining portions of said second insulating layer on only sidewalls of said raised surface features.