# US 5,352,619 A · Method for improving erase characteristics and coupling ratios of buried bit line flash EPROM devices

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- Number: US 5,352,619 A
- Document ID: US5352619A
- Status: Granted
- Kind: A
- Application number: 08/094,746
- Filed: 1993-07-22
- Granted: 1994-10-04
- Earliest claimed: 1993-07-22
- Assignees: United Microelectronics Corp.
- Inventors: Gary Hong
- Web page: https://patentgrep.com/patent/US5352619A

## CPC

- H10B 41/00: Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B 69/00: Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices
- H10D 30/683: {programmed by tunnelling of carriers, e.g. Fowler-Nordheim tunnelling}
- H10D 64/681: {having a compositional variation, e.g. multilayered}
- H10D 64/01346: {in a gaseous ambient using an oxygen or a water vapour, e.g. oxidation through a layer (H10D64/01344 takes precedence)}
- Y10S 148/114: Nitrides of silicon
- H10B: ELECTRONIC MEMORY DEVICES
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- Y10S: TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

## Abstract

A new method of obtaining a consistent controllable tunnel oxide near the source/drain edge of a contactless memory cell is described. A thick gate oxide layer is grown on a semiconductor substrate. A first polysilicon layer is deposited overlying the gate oxide layer. A silicon nitride layer followed by a silicon oxide layer are deposited overlying the first polysilicon layer. The silicon oxide, silicon nitride, and first polysilicon layers are patterned and etched. Arsenic ions are implanted through the gate oxide layer into the substrate to form buried source and drain bit lines within the substrate. A second layer of silicon nitride is deposited over the patterned layers and anisotropically etched to form sidewall spacers. SATO (self-aligned thick oxide) oxidation is performed over the N+ area. The nitride spacers are etched away whereby a portion of the gate oxide underlying the spacers is exposed. The silicon oxide layer is removed along with the exposed gate oxide. The thin tunnel oxide is regrown in the region where the nitride spacers were removed. The nitride layer is removed followed by deposition of a second layer of polysilicon overlying the first polysilicon layer. This layer is patterned such that it is overlying the SATO area to form the floating gate. An interpoly dielectric layer is deposited followed by a third polysilicon layer, deposited and patterned to form the control gate completing formation of the memory cell.

## Claims

### Claim 1

The method of forming a contactless memory cell wherein said memory cell has a consistent controllable tunnel oxide near the source/drain edge comprising:
providing a thick gate oxide layer of between about 150 to 500 Angstroms on a semiconductor substrate;
depositing a first polysilicon layer overlying said thick gate oxide layer;
depositing a silicon nitride layer overlying said first polysilicon layer;
depositing a silicon oxide layer overlying said silicon nitride layer;
patterning and etching said silicon oxide, silicon nitride, and first polysilicon layers;
implanting ions through said thick gate oxide layer into said substrate to form buried bit lines within said substrate wherein said buried bit lines act as source and drain regions;
depositing a second layer of silicon nitride over said patterned silicon oxide, silicon nitride, and first polysilicon layers and anisotropically etching said second silicon nitride layer to form spacers on the sidewalls of said patterned silicon oxide, silicon nitride, and first polysilicon layers overlying the edges of said source and drain buried bit lines;
growing an oxide layer on the surfaces of said substrate over said buried bit line regions;
removing said silicon nitride spacers whereby the portion of said thick gate oxide underlying said spacers is exposed;
removing said silicon oxide layer and said exposed portion of said thick gate oxide whereby said substrate is exposed in the areas underlying said removed portion of said thick gate oxide;
regrowing a tunnel oxide on said exposed areas of said substrate wherein said tunnel oxide has a consistent and controllable thickness and wherein said tunnel oxide is grown at said source and drain edges;
removing said silicon nitride layer;
depositing a second layer of polysilicon overlying said first polysilicon layer;
patterning said second layer of polysilicon to form a floating gate wherein said second polysilicon layer is patterned such that the edges of said floating gate overlie said oxide layer;
depositing an interpoly dielectric layer over said patterned second polysilicon layer; and
depositing and patterning a third layer of polysilicon to form the control gate of the completed memory cell.

### Claim 2 (depends on 1)

The method of claim 1 wherein said first polysilicon, silicon nitride, and silicon oxide layers have a combined thickness of between about 500 to 3000 Angstroms.

### Claim 3 (depends on 1)

The method of claim 1 wherein said ion implantation is done with Arsenic ions at a dose of between about 1 E 15 to 5 E 15 atoms/cm.sup.2 and energy of between about 50 to 100 Kev.

### Claim 4 (depends on 1)

The method of claim 1 wherein after said buried bit line ion implantation, phosphorus ions are implanted into the source side only of said substrate at a dosage of between about 2 E 14 to 8 E 14 atoms/cm.sup.2 and energy of between about 50 to 100 Kev.

### Claim 5 (depends on 1)

The method of claim 1 wherein said second silicon nitride layer is deposited to a thickness of between about 1000 to 5000 Angstroms.

### Claim 6 (depends on 1)

The method of claim 1 wherein said oxide layer is grown by a self-aligned oxidation method to a thickness of between about 500 to 3000 Angstroms.

### Claim 7 (depends on 1)

The method of claim 1 wherein said removal of said silicon nitride spacers is done by anisotropic dry etching.

### Claim 8 (depends on 1)

The method of claim 1 wherein said removal of said silicon oxide layer is done by a wet etching in dilute hydrofluoric acid.

### Claim 9 (depends on 1)

The method of claim 1 wherein said tunnel oxide is grown to a thickness of between about 60 to 120 Angstroms.

### Claim 10 (depends on 1)

The method of claim 1 wherein said second layer of polysilicon is deposited by low pressure chemical vapor deposition to a thickness of between about 500 to 3000 Angstroms.

### Claim 11 (depends on 1)

The method of claim 1 wherein said interpoly dielectric layer is composed of silicon oxide-silicon nitride-silicon oxide.

### Claim 12 (depends on 1)

The method of claim 1 wherein said third layer of polysilicon is deposited by low pressure chemical vapor deposition to a thickness of between about 500 to 3000 Angstroms.

### Claim 13

The method of forming a contactless memory cell wherein said memory cell has a consistent controllable tunnel oxide at the source edge comprising:
providing a thick gate oxide layer of between about 150 to 500 Angstroms on a semiconductor substrate;
depositing a first polysilicon layer overlying said thick gate oxide layer;
depositing a silicon nitride layer overlying said first polysilicon layer;
depositing a silicon oxide layer overlying said silicon nitride layer;
patterning and etching said silicon oxide, silicon nitride, and first polysilicon layers;
implanting ions through said thick gate oxide layer into said substrate to form buried source and drain regions within said substrate;
depositing a second layer of silicon nitride over said patterned silicon oxide, silicon nitride, and first polysilicon layers and anisotropically etching said second silicon nitride layer to form spacers on the sidewalls of said patterned silicon oxide, silicon nitride, and first polysilicon layers overlying the edges of said buried source and drain regions;
growing an oxide layer on the surfaces of said substrate over said buried source and drain regions;
forming a photomask over the drain side of said substrate;
removing said silicon nitride spacer on the source side of said substrate only whereby the portion of said thick gate oxide underlying said removed spacer is exposed;
removing said photomask over said drain side of said substrate;
removing said silicon oxide layer and said exposed portion of said thick gate oxide whereby said substrate is exposed in the area underlying said removed portion of said thick gate oxide;
regrowing a tunnel oxide on said exposed area of said substrate wherein said tunnel oxide has a consistent and controllable thickness and wherein said tunnel oxide is grown at said source edge;
removing said silicon nitride layer;
depositing a second layer of polysilicon overlying said first polysilicon layer;
patterning said second layer of polysilicon to form a floating gate wherein said second polysilicon layer is patterned such that the edges of said floating gate overlie said oxide layer;
depositing an interpoly dielectric layer over said patterned second polysilicon layer; and
depositing and patterning a third layer of polysilicon to form the control gate of the completed memory cell.

### Claim 14 (depends on 13)

The method of claim 13 wherein said first polysilicon, silicon nitride, and silicon oxide layers have a combined thickness of between about 500 to 3000 Angstroms.

### Claim 15 (depends on 13)

The method of claim 13 wherein said ion implantation is done with Arsenic ions at a dose of between about 1 E 15 to 5 E 15 atoms/cm.sup.2 and energy of between about 50 to 100 Kev.

### Claim 16 (depends on 13)

The method of claim 13 wherein after said buried source and drain region ion implantation, phosphorus ions are implanted into the source side only of said substrate at a dosage of between about 2 E 14 to 8 E 14 atoms/cm.sup.2 and energy of between about 50 to 100 Kev.

### Claim 17 (depends on 13)

The method of claim 13 wherein said second silicon nitride layer is deposited to a thickness of between about 1000 to 5000 Angstroms.

### Claim 18 (depends on 13)

The method of claim 13 wherein said oxide layer is grown by a self-aligned oxidation method to a thickness of between about 500 to 3000 Angstroms.

### Claim 19 (depends on 13)

The method of claim 13 wherein said removal of said silicon nitride spacer is done by anisotropic dry etching.

### Claim 20 (depends on 13)

The method of claim 13 wherein said removal of said silicon oxide layer is done by a wet etching in dilute hydrofluoric acid.

### Claim 21 (depends on 13)

The method of claim 13 wherein said tunnel oxide is grown to a thickness of between about 60 to 120 Angstroms.

### Claim 22 (depends on 13)

The method of claim 13 wherein said second layer of polysilicon is deposited by low pressure chemical vapor deposition to a thickness of between about 500 to 3000 Angstroms.

### Claim 23 (depends on 13)

The method of claim 13 wherein said interpoly dielectric layer is composed of silicon oxide-silicon nitride-silicon oxide.

### Claim 24 (depends on 13)

The method of claim 13 wherein said third layer of polysilicon is deposited by low pressure chemical vapor deposition to a thickness of between about 500 to 3000 Angstroms.