# US 5,352,490 A · Method of chemical vapor deposition in a continuous treatment line

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- Number: US 5,352,490 A
- Document ID: US5352490A
- Status: Granted
- Kind: A
- Application number: 07/910,827
- Filed: 1992-07-06
- Granted: 1994-10-04
- Earliest claimed: 1988-09-22
- Assignees: NKK Corporation
- Inventors: Masahiro Abe; Kazuhisa Okada; Shuzo Fukuda
- Web page: https://patentgrep.com/patent/US5352490A

## CPC

- C23C 16/45502: {Flow conditions in reaction chamber}
- C23C 16/455: characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C 16/45563: {Gas nozzles}
- C23C 16/545: {for coating elongated substrates}
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)

## Abstract

A reaction gas or a gas containing a reaction gas is blown through blowing nozzles onto a steel material in a chemical vapor deposition treating chamber at a velocity sufficient to forcibly remove reacted products from reacted surfaces of a steel material while suppressing irregular thickness of a deposited film.

## Claims

### Claim 1

A method of chemical vapor deposition in a continuous treatment line for coating the surface of a steel material having a surface by passing it through a chemical vapor deposition treating chamber, comprising blowing a reacting as or a gas containing a reacting gas onto the steel material through blowing nozzles in the chemical vapor deposition treating chamber so as to cause chemical vapor deposition on said surface at a velocity sufficient to forcibly remove products of the reaction caused by said reacting gas from said surface of the steel material, and concurrently carrying out chemical vapor deposition thereon, including blowing the gas onto the steel material from the blowing nozzles at discharging speed V.sub.o of not less than 0.5 m/sec.

### Claim 2 (depends on 1)

The method as claimed in claim 1, comprising blowing the gas onto the steel material at the flowing speed of not higher than 5 Nm/sec.

### Claim 3 (depends on 1, 2)

The method as claimed in claim 1 or 2, comprising blowing onto the steel material the gas as a mixed gas of not less than one kind of the following main gases, and not less than one kind of the following auxiliary gases or/and the following carrier gases
Main gases: AlCl.sub.3, BCl.sub.2, CrCl.sub.2, SiCl.sub.4, Si.sub.2 Cl.sub.6, SiH.sub.4, WCl.sub.2, ZrCl, TiCl.sub.4
Auxiliary gases: CH.sub.4, H.sub.2, N.sub.2, CO.sub.2, H.sub.2 O
Carrier gases: N.sub.2, Ar, He.

### Claim 4 (depends on 1, 2)

The method as claimed in claim 1 or 2, wherein said blowing nozzles include a plurality of blowing nozzles disposed along both sides of a transferring line of the steel material within the chemical vapor deposition treating chamber, and wherein said method comprising blowing the gas onto the running steel strip at both surfaces thereof through the blowing nozzles.

### Claim 5 (depends on 1, 2)

The method as claimed in claim 1 or 2, comprising blowing the gas from the blowing nozzles onto the steel material as a non-continuous steel material transferred by means of a transferring means.

### Claim 6 (depends on 1, 2)

The method as claimed in claim 1 or 2, comprising including SiCl.sub.4 in the reacting gas which is blown onto the steel material so as to form a coating of Si thereon.

### Claim 7 (depends on 1, 2)

The method as claimed in claim 1 or 2, wherein said blowing nozzles include a plurality of blowing nozzles disposed along both sides of a transferring line of the steel material within the chemical vapor deposition treating chamber, and including SiCl.sub.4 in the reaction gas which is blown onto the steel material at both surfaces thereof through the blowing nozzles, and carrying out a diffusion heating treatment on the steel material so as to diffuse Si thus deposited on the steel surfaces into the interior of the steel.