Micro positioning device
AssigneeInternational Business Machines Corporation
InventorsTomotake Furuhata, Toshiki Hirano
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Abstract
A device for providing micro positioning having an operating range in the submicron order in the X and Y directions, respectively. Positioning is achieved by depositing a pair of aluminum electrodes on a piezoelectric element bonded on a silicon wafer, vertically moving the piezoelectric element, arranging a plurality of micro actuators whose contact pin ends, formed on the aluminum electrodes, rotate on a surface as an array, and displacing in the horizontal direction a moving member arranged on the micro actuator array.
Claims17
A micro positioning semiconductor integrated device for achieving fine positioning of a friction driven moving member, comprising:
- a substrate;;
- a plurality of micro actuators arranged on said substrate in an array formation, each of said micro actuators comprising:
- a driving section providing vertical motion, and
- an elongated pin having two ends, one of said ends being free moving and the second contacting said driving section, wherein the vertical motion of the driving section drives the free moving end of said pin to rotate around a horizontal axis;
- and the moving member is resting on the free moving end of said pins, wherein friction converts the rotational motion of the pins into translational motion of the moving member, thereby providing controllable motion and fine positioning in a predetermined direction.
Dependencies are inferred from the claim text.