Method for producing electrical contact

A method of producing an electric contact which is provided on at least one of a pair of conductors and a surface of said at least one conductor being coated with a metal layer comprising a high melting point metal or an alloy of a high melting point metal and, on said metal layer, a ceramic layer comprising at least one material selected from the group consisting of nitrides, carbides and borides of high melting point metals, said method comprising the steps of:

• sputter etching a surface of said at least one conductor in a first reaction chamber which is kept at a reduced pressure,
• moving said sputter etched conductor to a second reaction chamber which is connected with said first reaction chamber through a connecting hole and kept at a pressure lower than that in said first chamber,
• forming a metal layer comprising a high melting point metal or an alloy of a high melting point metal on said sputter etched surface of said conductor by a vapor phase deposition method,
• moving said conductor having said metal layer thereon in the previous step to a third reaction chamber which is connected with said second chamber through a connecting hole and kept at a pressure lower than that in said second reaction chamber, and
• forming a ceramic layer comprising at least one material selected from the group consisting of nitrides, carbides and borides of high melting point metals on said metal layer formed on said conductor.