US 5,351,360 A · Cleaning device for a wafer mount plate

Abstract

A cleaning device for cleaning adhesive particles and other foreign matter from a disk-shaped wafer mount plate used in semiconductor fabrication comprises a plurality of support rollers supporting the wafer mount plate horizontally for rotation about its own axis. One or more driving rollers are brought into frictional contact with the peripheral side surface of the wafer mount plate to rotationally drive the same. An upper surface washing brush, a lower surface washing brush and a side surface washing brush are movable into brushing contact with the upper, lower and peripheral side surfaces, respectively, of the wafer mount plate for simultaneously brushing all the surfaces thereof while a washing liquid is sprayed thereon. Then rinsing liquid is sprayed on the wafer mount plate, which is thereafter dried by blowing drying gas thereon.

Claims19

Dependent claims

A cleaning device for cleaning a wafer mount plate, comprising:

supporting means for rotatably supporting a wafer mount plate having upper and lower surfaces bounded by a peripheral side surface to undergo rotation in a generally horizontal plane such that all the surfaces of the wafer mount plate are exposed during rotation of the wafer mount plate, the supporting means including a set of rotatable rollers for rotatably supporting thereon the lower surface of the wafer mount plate, the rollers being positioned beneath the wafer mount plate about a given axis and rotatably supporting the wafer mount plate for rotation about the given axis;
driving means for rotationally driving the wafer mount plate;
supplying means for supplying washing liquid to the surfaces of the wafer mount plate during rotation thereof;
and brushing means for brushing simultaneously the upper, lower and peripheral side surfaces of the wafer mount plate while the washing liquid is being supplied thereto.

1 more element

Dependencies are inferred from the claim text.

Cleaning device for a wafer mount plate

Life of this patent

Cleaning device for a wafer mount plate

Life of this patent

Abstract

Claims19