# US 5,351,279 A · X-ray microscope with a direct conversion type x-ray photocathode

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- Number: US 5,351,279 A
- Document ID: US5351279A
- Status: Granted
- Kind: A
- Application number: 08/143,091
- Filed: 1993-10-25
- Granted: 1994-09-27
- Earliest claimed: 1992-08-28
- Assignees: CSL Opto-Electronics Corp.
- Inventors: Yongzheng She; Shizheng Chen; Weilou Cao; Yanhua Shih
- Web page: https://patentgrep.com/patent/US5351279A

## CPC

- H01J 29/38: not using charge storage, e.g. photo-emissive screen, extended cathode {(electrodes using photo-emission in general H01J1/34)}
- H01J 31/506: {tubes using secondary emission effect}
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

A direct conversion X-ray photo-electron cathode has specially designed secondary electron emission layers which provides high efficiency, low noise, high speed and broad band X-ray photon detection. The X-ray photocathode is integrated with a micro channel plate and an output phosphor display screen to form a panel type X-ray intensifier. The X-ray intensifier is combined with a micro-focus X-ray source to provide projection type X-ray microscope for use in X-ray microscopic diagnostic applications.

## Claims

### Claim 1

A portable projection type real time X-ray microscope, comprising:
an X-ray source having a micron focal spot size;
a workpiece for holding an item to be investigated;
an X-ray direct conversion type image intensifier;
a movable parabolic illuminator in optical alignment with the X-ray image intensifier, for optically aligning the X-ray image intensifier with the object under investigation on the test workpiece, whereby upon moving the illuminator out of the alignment path of the X-ray source the X-ray test may be conducted on the test object;
illuminator moving means for moving the illuminator out of the alignment path during X-ray testing of the test object;
adjustment means for vertically moving said workpiece between the X-ray source and the parabolic illuminator for controlling the magnification of the X-ray image.

### Claim 2 (depends on 1)

The X-ray microscope of claim 1, further including a co-axial optical microscope for aligning an object under test.