X-ray tomography method and apparatus thereof

An X-ray tomography apparatus comprising:

• an X-ray source for irradiating X-rays to an inspection object;
• inspection object rotating arrangement for rotating the inspection object in a predetermined direction about a first rotational axis slanted with respect an optical axis of the X-rays irradiated from the X-ray source, said inspection object having a focal plane perpendicular to the first rotational axis and passing through an intersection of the optical axis and the first rotational axis;
• still X-ray detecting arrangement for detecting in a state of superposition of a plurality of focal plane X-ray images on the focal plane and of a plurality of nonfocal plane X-ray images outside of the focal plane sequentially transmitted through the inspection object which is rotated in the predetermined direction about the first rotational axis by the inspection object rotating arrangement and for converting the X-ray images into a plurality of optical images;
• a collimator lens for collimating the optical rays of the optical images outputted from said still X-ray detecting means to substantially parallel rays;
• an optical image rotating prism for rotating the optical images by refracting the parallel rays in synchronization with the rotated inspection object in direction reversed with respect to the predetermined direction about a second rotational axis in parallel to the first rotational axis so as to remove the plurality of nonfocal plane X-ray images by superposition in a state of moving the plurality of nonfocal plane X-ray images against the optical axis of X-rays;
• a focusing optical lens for focusing the optical images outputted from the still X-ray detecting arrangement;
• and
• photoelectric converting arrangement for receiving the optical images rotated by said optical image rotating prism and focused by said focusing optical lens so as to be superposed and for outputting a clear image signal corresponding to the focal plane X-ray image on an X-ray tomographic image so that the focal plane X-ray image on the X-ray tomographic image is obtained as the clear image signal having the plurality of nonfocal plane X-ray images from the photo-electric converting arrangement removed.