# US 5,351,257 A · VCSEL with vertical offset operating region providing a lateral waveguide and current limiting and method of fabrication > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 5,351,257 A - Document ID: US5351257A - Status: Granted - Kind: A - Application number: 08/028,015 - Filed: 1993-03-08 - Granted: 1994-09-27 - Earliest claimed: 1993-03-08 - Assignees: Motorola, Inc. - Inventors: Michael S. Lebby; Chan-Long Shieh; Donald E. Ackley - Web page: https://patentgrep.com/patent/US5351257A ## CPC - H01S 5/18327: {Structure being part of a DBR (H01S5/18391 takes precedence)} - H01S 5/0207: {Substrates having a special shape} - H01S 5/0422: {with n- and p-contacts on the same side of the active layer} - H01S 5/04257: {having positive and negative electrodes on the same side of the substrate} - H01S 2301/176: Specific passivation layers on surfaces other than the emission facet - H01S: DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL ## Abstract A VCSEL including a first mirror stack, an active region and a second mirror stack positioned on a substrate with portions of the active region and the first and second mirror stacks being offset from surrounding portions by an offset area in the surface of the substrate so as to define a lateral waveguide which confines the operating region of the VCSEL. The surrounding portions of the second mirror stack are removed to provide current control and refractory metal contacts are formed on the upper and lower surfaces. Methods of fabricating the offset as a depression or a mesa in the surface of the substrate and the resulting VCSEL are disclosed. ## Claims ### Claim 1 A vertical cavity surface emitting laser having an opening wavelength at which light emission occurs, the laser comprising: a supporting substrate having a surface lying in a first plane and a substantially centrally located offset area of the surface lying in a second plane parallel to the first plane and spaced therefrom, the offset area defining therein a generally circular area with a diameter approximately equal to a mode size for a lowest order of operating mode for the vertical cavity surface emitting laser, and the offset area being spaced from the surface of the substrate approximately an odd multiple of a quarter wavelength of the operating frequency; a first mirror stack positioned on the surface of the substrate so as to overlie the offset area and a portion of the surface surrounding the offset area; an active region including at least a layer positioned parallel and in overlying abutting engagement with the first mirror stack and substantially coextensive therewith; a second mirror stack positioned parallel and in overlying abutting engagement with the active region and substantially overlying only the offset area; and first portions of the active region and the first mirror stack being offset from second surrounding portions of the active region and the first mirror stack by the offset area in the surface of the substrate so as to define a lateral waveguide generally aligned with the second mirror stack. ### Claim 2 (depends on 1) A vertical cavity surface emitting laser as claimed in claim 1 including in addition a dielectric layer positioned in overlying relationship on exposed portions of the active layer and the second mirror stack. ### Claim 3 (depends on 2) A vertical cavity surface emitting laser as claimed in claim 2 including in addition an upper electrical contact formed of a refractory metal layer at least partially overlying the dielectric layer. ### Claim 4 (depends on 1) A vertical cavity surface emitting laser as claimed in claim 1 wherein the active region includes an active layer with overlying cladding layers positioned in abutting engagement on opposite sides thereof, the offset being large enough to position one of the cladding layers in the second surrounding portions in the same plane as the active layer in the first portion. ### Claim 5 (depends on 1) A vertical cavity surface emitting laser as claimed in claim 1 wherein the active region, including the active layer with overlying cladding layers, has a thickness of approximately a full wavelength of the laser emission in the first and second mirror stacks. ### Claim 6 (depends on 1) A vertical cavity surface emitting laser as claimed in claim 1 wherein the offset is a mesa formed in the surface of the supporting substrate. ### Claim 7 (depends on 1) A vertical cavity surface emitting laser as claimed in claim 1 wherein the offset is a depression formed in the surface of the supporting substrate. ### Claim 8 A vertical cavity surface emitting laser having an operating wavelength at which light emission occurs, the laser comprising: first and second mirror stacks with an active region sandwiched therebetween, the active region including an active layer; a preferred operating region defined in the first and second mirror stacks and the active region with portions of the second mirror stack outside of the preferred operating region being removed, the preferred operating region defining therein a volume with a generally circular cross-section having a diameter approximately equal to a mode size for a lowest order of operating mode for the vertical cavity surface emitting laser; and the operating region being vertically offset from portions of the first and second mirror stack and the active region which are outside of the operating region approximately an odd multiple of a quarter wavelength of the operating frequency so that the preferred operating region in the first mirror stack and at least the active layer of the active region are surrounded with portions of the first mirror stack and the active region outside of the preferred operating region having a different index of refraction so as to define a lateral waveguide in the preferred operating region. ### Claim 9 (depends on 8) A vertical cavity surface emitting laser as claimed in claim 8 including in addition a first refractory metal contact electrically connected to the second mirror stack. ### Claim 10 (depends on 9) A vertical cavity surface emitting laser as claimed in claim 9 including in addition a second refractory metal contact electrically connected to the first mirror stack. ### Claim 11 A method of manufacturing a vertical cavity surface emitting laser having an operating wavelength at which light emission occurs, the method comprising the steps of: providing a supporting substrate having a substantially planar surface; forming an offset in the substrate and substantially centrally located in the surface, the offset defining a surface lying in a first plane and an outer edge lying in a second plane parallel to the first plane and spaced therefrom with the first and second planes being parallel to the planar surface, the offset surface defining therein a generally circular area with a diameter approximately equal to a mode size for a lowest order of operating mode for the vertical cavity emitting laser, and the first and second planes being spaced apart approximately an odd multiple of a quarter wavelength of the operating frequency; positioning a first mirror stack on the surface of the substrate so as to overlie the offset in the substrate and a portion of the surface surrounding the offset; positioning an active region including at least a layer parallel and in overlying abutting engagement with the first mirror stack and substantially coextensive therewith; positioning a second mirror stack parallel and in overlying abutting engagement with the active region and substantially coextensive therewith; further positioning the first and second mirror stacks and the active region so that first portions of the active region and the first and second mirror stacks are offset from second surrounding portions of the active region and the first and second mirror stacks, respectively, by the offset in the substrate so as to define a lateral waveguide; and removing portions of the second mirror stack overlying the portions of the surface surrounding the offset in the substrate. ### Claim 12 (depends on 11) A method as set forth in claim 11 wherein the step of removing portions of the second mirror stack overlying the portions of the surface surrounding the offset in the substrate is performed by etching. ### Claim 13 (depends on 12) A method as set forth in claim 12 wherein the step of removing portions of the second mirror stack overlying the portions of the surface surrounding the offset in the substrate includes forming a mask on the second mirror stack to define portions of the second mirror stack to be removed, prior to etching. ### Claim 14 (depends on 13) A method as set froth in claim 13 wherein the step of forming a mask on the second mirror stack to define portions of the second mirror stack to be removed includes depositing a layer including TiWNx on the second mirror stack and removing all of the layer except a portion overlying the offset in the substrate. ### Claim 15 (depends on 14) A method as set forth in claim 14 wherein the step of removing portions of the second mirror stack overlying the portions of the surface surrounding the offset in the substrate is performed by reactive ion etching unmasked portions of the second mirror stack. ### Claim 16 (depends on 11) A method as set forth in claim 11 wherein the step of forming an offset in the substrate includes etching the surface of the substrate to provide a mesa as the offset in the substrate. ### Claim 17 (depends on 11) A method as set froth in claim 11 wherein the step of forming an offset in the substrate includes etching the surface of the substrate to provide a depression as the offset in the substrate. ### Claim 18 (depends on 11) A method as set forth in claim 11 wherein the step of forming an offset in the substrate includes forming the offset approximately an odd multiple of one quarter wavelength of the operating wavelength. ### Claim 19 (depends on 11) A method as set froth in claim 11 wherein the step of positioning an active region includes positioning an active layer with parallel abutting overlying cladding layers on opposite sides thereof. ### Claim 20 (depends on 19) A method as set froth in claim 19 wherein the step of positioning an active region includes positioning an active layer with parallel abutting overlying cladding layers on opposite sides thereof, the total active region having a thickness of approximately a full wavelength of the laser emission in the first and second mirror stacks. ### Claim 21 A method of manufacturing a vertical cavity surface emitting laser having an operating wavelength at which light emission occurs, the method comprising the steps of: providing a supporting substrate having a substantially planar surface; forming an offset in the substrate and substantially centrally located in the surface of the substrate, the offset in the substrate defining an offset surface lying in a first plane and an outer edge lying in a second plane parallel to the first plane and spaced therefrom with the first and second planes being parallel to the planar surface, the offset surface defining therein a generally circular area with a diameter approximately equal to a mode size for a lowest order of operating mode for the vertical cavity surface emitting laser, and the first and second planes being spaced apart approximately an odd multiple of a quarter wavelength of the operating frequency; positioning a first mirror stack on the surface of the substrate so as to overlie the offset in the substrate and a portion of the surface surrounding the offset; positioning an active region including at least a layer parallel and in overlying abutting engagement with the first mirror stack and substantially coextensive therewith; positioning a second mirror stack parallel and in overlying abutting engagement with the active region and substantially coextensive therewith; further positioning the first and second mirror stacks and the active region so that first portions of the active region and the first and second mirror stacks are offset from second surrounding portions of the active region and the first and second mirror stacks, respectively, by the offset in the surface of the substrate so as to define a lateral waveguide; and removing portions of the second mirror stack overlying the portions of the surface surrounding the offset in the substrate using the steps of forming a mask on the second mirror stack to define portions of the second mirror stack to be removed by depositing a layer including TiWNx on the second mirror stack and removing all of the layer except a portion overlying the offset in the substrate and plasma etching unmasked portions of the second mirror stack. ### Claim 22 (depends on 21) A method as set forth in claim 21 wherein the step of positioning an active region includes depositing a stop etch layer between the active region and the second mirror stack. ### Claim 23 (depends on 22) A method as set froth in claim 22 wherein the step of depositing a stop etch layer between the active region and the second mirror stack includes forming a layer between 50 and 200 A thick including one of InGaAs, InGaAlAs, InAlAs and InGaP. ### Claim 24 A method of manufacturing a vertical cavity surface emitting laser having an operating wavelength at which light emission occurs, the method comprising the steps of: providing a supporting substrate having a substantially planar surface; forming an offset in the substrate and substantially centrally located in the surface of the substrate, the offset in the substrate defining an offset surface lying in a first plane and an outer edge lying in a second plane parallel to the first plane and spaced therefrom with the first and second planes being parallel to the planar surface, the offset surface defining therein a generally circular area with a diameter approximately equal to a mode size for a lowest order of operating mode for the vertical cavity surface emitting laser, and the first and second planes being spaced apart approximately an odd multiple of a quarter wavelength of the operating frequency; positioning a first mirror stack on the surface of the substrate so as to overlie the offset in the substrate and a portion of the surface surrounding the offset; positioning an active region including at least a layer parallel and in overlying abutting engagement with the first mirror stack and substantially coextensive therewith; positioning a second mirror stack parallel and in overlying abutting engagement with the active region and substantially coextensive therewith; further positioning the first and second mirror stacks and the active region so that first portions of the active region and the first and second mirror stacks are offset from second surrounding portions of the active region and the first and second mirror stacks, respectively, by the offset in the surface of the substrate so as to define a lateral waveguide; removing portions of the second mirror stack overlying the portions of the surface surrounding the offset in the substrate using the steps of forming a mask on the second mirror stack to define portions of the second mirror stack to be removed by depositing a layer including TiWNx on the second mirror stack and removing all of the layer except a portion overlying the offset in the substrate; and forming a dielectric layer over all exposed portions of the second mirror stack. ### Claim 25 (depends on 24) A method as set froth in claim 24 including in addition a step of depositing a layer of refractory metal on the dielectric layer and in contact with the layer including TiWNx on the second mirror stack. ### Claim 26 (depends on 25) A method as set forth in claim 25 including in addition a step of removing all material on a surface of the second mirror stack approximately centrally located over an end of the lateral waveguide to form a light output.