# US 5,351,163 A · High Q monolithic MIM capacitor

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- Number: US 5,351,163 A
- Document ID: US5351163A
- Status: Granted
- Kind: A
- Application number: 07/998,219
- Filed: 1992-12-30
- Granted: 1994-09-27
- Earliest claimed: 1992-12-30
- Assignees: Westinghouse Electric Corp.
- Inventors: Dale E. Dawson; Albert A. Burk, Jr.; Harlan C. Cramer; Ronald C. Brooks; Howell G. Henry
- Web page: https://patentgrep.com/patent/US5351163A

## CPC

- H10D 1/68: Capacitors having no potential barriers
- H01G 4/08: Inorganic dielectrics
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H01G: CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE (selection of specified materials as dielectric H01B3/00; capacitors having potential barriers H10D1/62, H10K10/10)

## Abstract

A high Q monolithic metal-insulator-metal (MIM) capacitor utilizing a single crystal dielectric material. A dielectric membrane is epitaxially grown on a substrate. The membrane acts as an etch-stop when a backside etch is used to form a cavity in the substrate, resulting in a single crystal dielectric membrane spanning the cavity. Electrodes are formed on opposite surfaces of the membrane at the cavity location. For a shunt capacitor application, the bottom electrode is connected to the backside substrate metallization. For a series capacitor application, the bottom electrode is isolated from the backside metallization, but is connected to the topside circuitry through a via formed in the membrane. The membrane may consist of two dielectric layers, where the first layer is an etchstop material. In one embodiment the substrate and second dielectric layer are gallium arsenide and the first dielectric layer is aluminum gallium arsenide.

## Claims

### Claim 1

A capacitor comprising:
a substrate having a cavity therein;
a dielectric membrane disposed on said substrate and spanning said cavity;
a first conductor disposed on a top surface of said membrane opposed said cavity;
a second conductor disposed on a bottom surface of said membrane within said cavity.

### Claim 2 (depends on 1)

The device of claim 1, wherein said membrane comprises an etch-stop material.

### Claim 3 (depends on 1)

The device of claim 1, wherein said membrane comprises a single crystal material.

### Claim 4 (depends on 1)

The device of claim 1, further comprising a third conductor disposed on said top surface of said membrane, said third conductor and said second conductor connected through a via in said membrane.

### Claim 5 (depends on 1)

The device of claim 1, wherein said second conductor further comprises a backside metallization for said substrate.

### Claim 6 (depends on 1)

The device of claim 1, wherein said membrane comprises:
a first dielectric layer disposed on said substrate; and
a second dielectric layer disposed on said first dielectric layer;
wherein said first dielectric layer comprises an etch-stop material.

### Claim 7 (depends on 6)

The device of claim 6, wherein both said first and said second dielectric layers comprise single crystal materials.

### Claim 8 (depends on 6)

The device of claim 6, wherein said substrate comprises gallium arsenide, said first dielectric layer comprises aluminum gallium arsenide, and said second dielectric layer comprises gallium arsenide.

### Claim 9 (depends on 1)

The device of claim 1, wherein said first conductor comprises a superconducting material.