# US 5,351,001 A · Microwave component test method and apparatus

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- Number: US 5,351,001 A
- Document ID: US5351001A
- Status: Granted
- Kind: A
- Application number: 07/504,803
- Filed: 1990-04-05
- Granted: 1994-09-27
- Earliest claimed: 1990-04-05
- Assignees: General Electric Company
- Inventors: William P. Kornrumpf; David A. Bates
- Web page: https://patentgrep.com/patent/US5351001A

## CPC

- H10W 70/614: {the multiple chips being integrally enclosed}
- G01R 1/04: Housings; Supporting members; Arrangements of terminals
- H10W 70/099: {Connecting interconnections to insulating or insulated package substrates, interposers or redistribution layers}
- H10W 70/60: Insulating or insulated package substrates; Interposers; Redistribution layers (leadframes H10W70/40)
- H10W 70/682: {comprising holes having chips therein}
- H10W 72/874: {On different surfaces}
- H10W 72/9413: {on encapsulations}
- H10W 90/00: Package configurations
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12)

## Abstract

A test fixture for testing microwave components enables components to be tested with high correlation between the component's test results and its operation in a system. The test fixture provides for non-destructive mounting of and connection of the component to the test fixture in the same manner as it will be connected in the final system and also provides for tailoring of the test connections as may be desired.

## Claims

### Claim 1

A method of pre-testing microwave components comprising the steps of:
providing a test fixture comprising a test substrate including:
a mounting location for a component to be tested,
first and second microwave transmission lines for connection to said component to be tested when said component to be tested is disposed at said mounting location, said first and second microwave transmission lines each having first and second ends, each of said first ends being disposed in the vicinity of said mounting location and each of said second ends being disposed remote from said mounting location, and
a power supply terminal for connection to said component to be tested;
disposing said component to be tested at said mounting location;
connecting said first end of said first microwave transmission line to a first microwave port of said component to be tested, said first end of said second microwave transmission line to a second microwave port of said component to be tested and said power supply terminal to a power supply terminal of said component to be tested by the steps of:
bonding a dielectric overlay layer to said test fixture and said component to be tested,
providing an aperture in said dielectric overlay layer to expose conductive material on said component to be tested, and
disposing a pattern of conductors on said dielectric overlay layer in ohmic contact with said power supply and control signal terminals, said first and second transmission lines and said conductive material on said component to be tested;
applying power and a test signal to said component to be tested; and
determining the response of said component to be tested to said test signal.

### Claim 2 (depends on 1)

The method recited in claim 1 wherein:
said pattern of conductors provides an microwave-impedance-matched connection between said component to be tested and first ends of said first and second transmission lines.

### Claim 3 (depends on 2)

The method recited in claim 2 wherein said test fixture further comprises:
means for connecting an microwave matched test probe to second ends of said first and second microwave transmission lines.

### Claim 4 (depends on 1)

The method recited in claim 1 which further comprises, following the step of disposing a pattern of conductors on said dielectric overlay layer, removing said dielectric overlay layer every place except where a conductor lies directly over that dielectric.

### Claim 5

A method of pre-testing microwave components comprising the steps of:
providing a test fixture comprising a test substrate having a conductive surface and an open cavity for mounting a component to be tested;
disposing said component to be tested at said mounting location, said component to be tested having contact pads on a first surface thereof and including a first microwave port;
applying a dielectric overlay over said substrate and said first surface of said component and bridging any gap between said first surface of said component and the adjacent portion of the surface of said substrate and providing via holes in said dielectric layer in alignment with appropriate ones of said contact pads;
forming a pattern of conductors on said dielectric overlay, said conductors including a first signal conductor which comprises a first microwave transmission line, said first signal conductor being connected to said first microwave port of said component to be tested;
connecting a test probe to appropriate portions of said pattern of conductors;
applying appropriate test signals to said component to be tested; and
determining the response of said component to said test signal.

### Claim 6 (depends on 5)

The method recited in claim 5 wherein the step of disposing comprises:
bonding said component to be tested to said mounting location.

### Claim 7 (depends on 5)

The method recited in claim 5 wherein:
said pattern of conductors further comprises control signal lines for connecting control signals provided by said probe to said component to be tested.

### Claim 8 (depends on 7)

The method recited in claim 7 further comprises:
removing said dielectric from portions of said component to be tested.

### Claim 9 (depends on 5)

The method recited in claim 5 wherein:
said pattern of conductors comprises a second signal conductor which comprises a second microwave transmission line.

### Claim 10 (depends on 9)

The method recited in claim 9 wherein:
said conductive surface of said substrate serves as the ground conductors of said first and second microwave transmission lines.

### Claim 11 (depends on 5)

The method recited in claim 5 wherein:
said conductive surface of said substrate serves as the ground conductor of said first microwave transmission line.

### Claim 12 (depends on 5)

The method recited in claim 5 wherein said pattern of conductors includes a standard configuration of probe contact pads for direct connection to said probe.

### Claim 13

Testing apparatus for use in testing microwave components, said apparatus comprising:
a test substrate including:
a mounting location for a component to be tested, and
first and second test ports for connection to said component to be tested when said component to be tested is disposed at said mounting location, said first test port being a microwave port and coupled to a microwave transmission line, said microwave transmission line having a second end disposed remote from said mounting location;
a dielectric overlay layer bonded to said test fixture and said component to be tested, said dielectric overlay layer having apertures exposing conductive material on said component to be tested and exposing said first and second test ports; and
a pattern of conductors on said dielectric overlay layer in ohmic contact with said first and second test ports and said conductive material on said component to be tested for electrically connecting said component to be tested to said test ports.

### Claim 14 (depends on 13)

The testing apparatus recited in claim 13 wherein said test substrate further includes:
a power supply terminal for connection to said component to be tested.

### Claim 15 (depends on 14)

The testing apparatus recited in claim 14 wherein said test substrate further includes:
control signal terminals for connection to said component to be tested.

### Claim 16 (depends on 14)

The testing apparatus fixture recited in claim 14 wherein said test substrate further includes:
means for connecting a microwave matched test probe to said second end of said test microwave transmission line.

### Claim 17 (depends on 13)

The testing apparatus recited in claim 13, wherein said dielectric overlay layer is present only where a conductor lies directly over the dielectric layer.
