# US 5,350,944 A · Insulator films on diamonds > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 5,350,944 A - Document ID: US5350944A - Status: Granted - Kind: A - Application number: 07/839,487 - Filed: 1992-02-20 - Granted: 1994-09-27 - Earliest claimed: 1989-01-03 - Assignees: Massachusetts Institute of Technology - Inventors: Michael W. Geis; Daniel L. Smythe - Web page: https://patentgrep.com/patent/US5350944A ## CPC - H10D 8/60: Schottky-barrier diodes - H10D 30/01: Manufacture or treatment - H10D 30/031: {of thin-film transistors [TFT]} - H10D 30/6741: {Group IV materials, e.g. germanium or silicon carbide (TFTs having oxide semiconductors H10D30/6755)} - H10D 62/8303: {Diamond} - H10D 64/01364: {the semiconductor being diamond, semiconducting diamond-like carbon or graphene} - H10D 64/64: Electrodes comprising a Schottky barrier to a semiconductor - H10D 64/68: characterised by the insulator, e.g. by the gate insulator - H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES ## Abstract Electrical quality insulating films on n-type and p-type diamond substrates are provided in which an insulating film such as a silicon dioxide film is deposited onto the exposed face of a diamond substrate, such as by chemical vapor deposition. Forming a conducting layer atop the silicon dioxide allows the creation of a metal-oxide-silicon device with which semiconductor carriers can be controlled through the application of a bias voltage to the conductor surface. ## Claims ### Claim 1 A semiconductor diamond field-effect transistor device that is substantially free of operational effects from interface states, comprising: a diamond semiconductor substrate having mobile semiconductor charge carriers, a CVD-deposited non-epitaxial silicon dioxide insulating film having a thickness of about 0.1 .mu.m or less on said diamond substrate, and a conducting layer on said insulating film for imposing an electric field in said substrate through said film, said film enabling the formation of a predetermined depletion region in said substrate for control of said mobile carriers when electrical fields are imposed through said film by said conducting layer, said device being substantially free of operational effects due to interface states as characterized by a capacitance versus bias voltage relationship that is substantially unaffected by a change in the frequency of said bias voltage over about 4 KHz to 10 MHz. ### Claim 2 (depends on 1) The device of claim 1 wherein said film is SiO.sub.2. ### Claim 3 (depends on 1) The device of claim 1 wherein said diamond semiconductor substrate is made of p-type diamond and said CVD-deposited film is on a (100) surface. ### Claim 4 (depends on 3) The device of claim 3 wherein said conducting layer is selected from the group consisting of doped polysilicon and a metal. ### Claim 5 (depends on 4) The device of claim 4 wherein said metal is aluminum, chrome-gold or tungsten. ### Claim 6 (depends on 2, 3) The device of claim 2 or 3 wherein the thickness of said film is determined to inhibit substantial tunneling of charge carriers through said film. ### Claim 7 (depends on 6) The device of claim 6 wherein said device is incorporated into a depletion mode field effect transistor. ### Claim 8 (depends on 7) The device of claim 7 wherein the thickness of said film is between about 10 to 100 nm. ### Claim 9 (depends on 4) The device of claim 4 wherein the thickness of said insulating film is less than or equal to approximately 10 nanometers for forming a rectifying contact. ### Claim 10 A semiconductor diamond field-effect transistor device that is substantially free of operational effects from interface states, comprising: a diamond semiconductor substrate having a (111) surface and mobile semiconductor charge carriers, a CVD-deposited non-epitaxial silicon dioxide insulating film having a thickness of about 0.1 .mu.m or less on said (111) surface of said diamond substrate, and a conducting layer on said insulating film, said film enabling control of said mobile carriers in said diamond substrate when electrical fields are imposed on said film through said conducting layer, said device being substantially free of operational effects due to interface states, said device characterized by a capacitance versus bias voltage relationship that is substantially unaffected by a change in the frequency of said bias voltage over about 4 KHz to 10 MHz. ### Claim 11 (depends on 10) The device of claim 10 wherein said conducting layer is selected from the group consisting of doped polysilicon or a metal. ### Claim 12 (depends on 10) The device of claim 10 wherein said metal is aluminum, chrome-gold or tungsten. ### Claim 13 (depends on 10) The device of claim 10 or wherein said device is incorporated in a cold cathode. ### Claim 14 A semiconductor device comprising an N-type diamond semiconductor substrate and a means for controlling semiconductor charge carriers, said means comprising an insulating film selected from the group consisting of CaF.sub.2 or BaF.sub.2 on said diamond substrate, and a means for imposing an electric field in said substrate through said film, said film enabling the formation of a predetermined depletion region in said substrate for control of said mobile carriers in said diamond substrate when electrical fields are imposed on said film. ### Claim 15 (depends on 14) The device of claim 14 wherein said film has a thickness of about 100 nm or less. ### Claim 16 (depends on 14, 15) The device of any one of claims 14 or 15 wherein said device is a three terminal switching device. ### Claim 17 (depends on 14, 15) The device of any one of claims 14 or 15 wherein said device is an NPN gate device. ### Claim 18 A semiconductor device comprising: a diamond semiconductor substrate having a (111) surface and means for controlling semiconductor charge carriers, said means comprising a non-diamond insulating film on said (111) surface of said diamond substrate, and a means for imposing an electric field in said substrate through said film, said film enabling control of said mobile carriers in said diamond substrate when electrical fields are imposed on said film, said film being selected from CaF.sub.2 and BaF.sub.2. ### Claim 19 A semiconductor diamond field-effect transistor device that is substantially free of operational effects from interface states, comprising a diamond semiconductor substrate having mobile semiconductor charge carriers, a CVD-deposited non-epitaxial silicon dioxide insulating film having a thickness of about 0.1 .mu.m or less on said diamond substrate, and a conducting layer on said insulating film for imposing an electric field in said substrate through said film, said film enabling the formation of a predetermined depletion region in said substrate for control of said mobile carriers when electrical fields are imposed through said film by said conducting layer, said device being substantially free of operational effects due to interface states as characterized by a capacitance versus bias voltage relationship that is substantially unaffected by a change in the frequency of said bias voltage over about 4 KHz to 10 MHz, said semiconductor diamond field-effect transistor device provided by a method comprising the steps of: providing said diamond semiconductor substrate, cleaning said diamond semiconductor substrate, heating said diamond substrate to a temperature of about 620.degree. C., in a gaseous mixture of SiH.sub.4, O.sub.2 and N.sub.2 to form said silicon dioxide insulating film with the total pressure being near atmospheric pressure, and depositing said conducting layer upon a region of said silicon dioxide insulating film.