US 5,350,738 A · Method of manufacturing an oxide superconductor film

Abstract

The present invention provides a method of manufacturing a high quality oxide superconductor film capable of controlling the film-forming rate and the film composition easily and forming the superconductor film safely and economically, over a wide region and homogeneously, wherein each of elements of R in which R represents one or more of elements selected from the group consisting of Y and lanthanide series rare earth elements, Ba and Cu is vapor deposited in the state of metal on a substrate under a high vacuum of lower than 10.sup.-8 Torr by a vacuum vapor deposition process to form a precursor comprising an amorphous metal and the precursor is oxidized and crystallized by applying a heat treatment without taking out the same into the atmospheric air.

Claims18

Dependent claims

A method of manufacturing an oxide superconductor film, which comprises the steps of:

vapor depositing each of elements of R, in which R represents one or more elements selected from the group consisting of Y and lanthanide series rare earth elements, Ba, and Cu, each in metallic form, onto a substrate by means of a vacuum deposition process while maintaining a high vacuum of lower than 10.sup.-8 Torr, thereby forming a metallic deposited film, and;
heating the metallic deposited film in an oxidizing atmosphere thereby oxidizing and crystallizing the deposited film, and
not exposing the deposited film to atmospheric air during the steps of vapor depositing and heating, thereby manufacturing said oxide superconductor film.

A method of manufacturing an oxide superconducting film, comprising the steps of:

depositing Ba, Cu, and at least one element from the group consisting of Y and lanthanide series rare earth elements, onto a substrate thereby forming a metallic first film on the substrate, wherein said step of depositing comprises maintaining a high vacuum of lower than 10.sup.-8 Torr in a region around the substrate and the depositing elements thereby limiting impurities incorporated into the metallic first film;
heating the metallic first film in an oxidizing atmosphere thereby transforming the metallic first film into a second film;
and
wherein the first film and the second film are protected against exposure to carbon dioxide and moisture, from during the step of depositing, until after the step of heating.

1 more element

Dependencies are inferred from the claim text.

Method of manufacturing an oxide superconductor film

Life of this patent

Method of manufacturing an oxide superconductor film

Life of this patent

Abstract

Claims18