# US 5,350,715 A · Chip identification scheme

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- Number: US 5,350,715 A
- Document ID: US5350715A
- Status: Granted
- Kind: A
- Application number: 07/974,423
- Filed: 1992-11-12
- Granted: 1994-09-27
- Earliest claimed: 1991-11-12
- Assignees: Samsung Electronics Co., Ltd.
- Inventors: Wui-soo Lee
- Web page: https://patentgrep.com/patent/US5350715A

## CPC

- H10W 46/00: Marks applied to devices, e.g. for alignment or identification
- H10W 46/106: {digital information, e.g. bar codes}
- H10W 46/401: {for identification or tracking}
- H10W 46/601: {for use after dicing}
- H10W 46/603: {Formed on wafers or substrates before dicing and remaining on chips after dicing}
- Y10S 438/975: Substrate or mask aligning feature
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- Y10S: TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

## Abstract

A method for determining the original location of each of a multiplicity of semiconductor chips fabricated on a common wafer, including the step of applying location identification data to each of the chips, wherein the location identification data is indicative of the original location of the chip on the wafer. The applying step is preferably performed during the process for fabricating the chips on the wafer, for example, by means of using a photomask in a conventional photolithographic process to etch a location identification mark on a predetermined layer of each chip. The location identification mark can be, for example, a dot matrix pattern which signifies the original location of the chip to which it is affixed on the wafer on which it was fabricated, in accordance with a binary coding scheme. The location identification data can be detected or read from any of the chips even after they are separated from the wafer, to thereby facilitate wafer fabrication process control, by facilitating the determination of the original wafer location of any chips which are found to be defective.

## Claims

### Claim 1

A method for determining the original location of a semiconductor chip fabricated on a wafer, comprising the step of applying a location identification mark on the chip, said location identification mark being indicative of the original location of the chip on the wafer, said location identification mark being comprised of a plurality m of rows of binary indicia and a plurality n of columns of binary indicia arranged in an m x n matrix, wherein a total coded value for said matrix is calculated by summing total row values calculated for each row by multiplying a row value assigned to that row by the sum of column values assigned to each column in that row where a "1" bit is present.

### Claim 2 (depends on 1)

The method as set forth in claim 1, further comprising the step of detecting said location identification mark after the chip is separated from the wafer.

### Claim 3 (depends on 2)

The method as set forth in claim 2, further comprising the step of determining the original location of the chip on the wafer in response to said detecting step.

### Claim 4 (depends on 1)

The method as set forth in claim 1, wherein said applying step is performed during the process for fabricating the chip on the wafer.

### Claim 5

The method as set forth in claim. 1, wherein said applying step is carried out by means of a photolithographic process performed during the process for fabricating the chip on the wafer.

### Claim 6 (depends on 5)

The method as set forth in claim 5, wherein said photolithographic process is performed by means of using a photomask having a dot matrix pattern to etch a corresponding matrix pattern of contact holes in a layer of the chip.

### Claim 7 (depends on 6)

The method as set forth in claim 6, wherein said corresponding matrix pattern occupies a relatively small portion of the total area of a surface of said layer of the chip.

### Claim 8 (depends on 1)

The method as set forth in claim 1, wherein said patterned indicia include an additional row having a total row value which serves as a position reference for facilitating alignment of a detection means for detecting said indicia.