# US 5,350,699 A · Method of manufacturing a hetero-junction bi-polar transistor

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- Number: US 5,350,699 A
- Document ID: US5350699A
- Status: Granted
- Kind: A
- Application number: 08/059,268
- Filed: 1993-05-11
- Granted: 1994-09-27
- Earliest claimed: 1991-07-19
- Assignees: Rohm Co., Ltd.
- Inventors: Keita Nii
- Web page: https://patentgrep.com/patent/US5350699A

## CPC

- H10D 62/8325: {Silicon carbide}
- H10D 10/021: {of heterojunction BJTs [HBT]}
- H10D 10/861: {having an emitter region comprising one or more non-monocrystalline elements of Group IV, e.g. amorphous silicon}
- H10D 12/031: {of IGBTs}
- Y10S 148/148: Silicon carbide
- Y10S 438/931: Silicon carbide semiconductor
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- Y10S: TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

## Abstract

A hetero-junction bi-polar transistor provided with a collector composed of a .beta. - SiC substrate and a base area composed of a .beta. - SiC layer and an emitter area composed of an .alpha. - SiC layer, thereby forming a hetero-junction bi-polar transistor having superior heat resistance.

## Claims

### Claim 1

A method of manufacturing a hetero-junction bipolar transistor comprising the steps of:
A) forming a beta silicon carbide layer of a first type of conductivity on a top face of a beta silicon carbide substrate of a second type of conductivity which is opposite of that of the first type of conductivity, the beta silicon carbide layer of the first type of conductivity forming a base area of the transistor and the beta silicon carbide substrate of the second type of conductivity forming the collector of the transistor;
B) forming an alpha silicon carbide layer of the second type of conductivity on the beta silicon carbide layer of the first type of conductivity, the alpha silicon carbide layer of the second type of conductivity forming the emitter of the transistor;
C) selectively removing a portion of the alpha silicon carbide layer of the second type of conductivity to expose a portion of the beta silicon carbide layer of the first type of conductivity; and
D) respectively forming collector, base, and emitter electrodes on the beta silicon carbide substrate of the second type of conductivity, the beta silicon carbide layer of the first type of conductivity and the alpha silicon carbide layer of the second type of conductivity.

### Claim 2 (depends on 1)

A method as recited in claim 1, wherein the first type of conductivity is a P type of conductivity and the second type of conductivity is an N type of conductivity.

### Claim 3 (depends on 2)

A method as recited in claim 2, wherein the beta silicon carbide layer in Step A is formed by ion implantation.

### Claim 4 (depends on 3)

A method as recited in claim 3, wherein boron ions are injected by ion implantation.

### Claim 5 (depends on 2)

A method as recited in claim 2, wherein the alpha silicon carbide layer in step B is formed by an RF-CVD method.

### Claim 6 (depends on 5)

A method as recited in claim 5, wherein a phosphorus dopant is used in the RF-CVD method.

### Claim 7 (depends on 6)

A method as recited in claim 6, wherein the alpha silicon carbide layer is grown to a thickness on the order of 0.2 micrometers using a 1200.degree. C. basic plate temperature and a reaction gas composition of SiH.sub.4 (0.15 sccm) and C.sub.3 H.sub.8 (0.2 sccm).

### Claim 8 (depends on 2)

A method as recited in claim 2, wherein the portion of the alpha silicon carbide layer is removed in step C by a plasma etching method.

### Claim 9 (depends on 8)

A method as recited in claim 8, wherein plasma etching is effected at an RF power of 200 watts and a pressure of 0.005 Torr and a reaction gas composition of 50% O.sub.2 and 50% CF.sub.4.

### Claim 10 (depends on 1)

A method as recited in claim 1, wherein the beta silicon carbide layer in Step A is formed by ion implantation.

### Claim 11 (depends on 1)

A method as recited in claim 1, wherein the alpha silicon carbide layer in step B is formed by an RF-CVD method.

### Claim 12 (depends on 1)

A method as recited in claim 1, wherein the portion of the alpha silicon carbide layer is removed in step C by a plasma etching method.