# US 5,350,499 A · Method of producing microscopic structure

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- Number: US 5,350,499 A
- Document ID: US5350499A
- Status: Granted
- Kind: A
- Application number: 08/034,619
- Filed: 1993-03-19
- Granted: 1994-09-27
- Earliest claimed: 1990-09-17
- Assignees: Matsushita Electric Industrial Co., Ltd.
- Inventors: Narito Shibaike; Michiyoshi Nagashima; Fumiaki Ueno; Toshinori Kishi
- Web page: https://patentgrep.com/patent/US5350499A

## CPC

- H01J 37/3056: {for microworking, e. g. etching of gratings or trimming of electrical components}
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

A method of producing a microscopic structure by anisotropic etching, in which ion etcing is conducted by irradiating an ion beam emitted by an ion source over a workpiece while a direction of progress of the ion etching is being changed.

## Claims

### Claim 1

A method of producing a microscopic structure by ion etching, in which an ion beam emitted by an ion source is irradiated over a workpiece by using a plurality of kinds of resists,
wherein an angle of incidence of the ion beam relative to the workpiece is changeable,
etching of an identical layer of the workpiece being repeated while changing the angle of incidence of the ion beam relative to the workpiece each time replacement of the resists is performed, whereby the workpiece has an irregular desired cross-sectional shape.

### Claim 2 (depends on 1)

A method as claimed in claim 1, wherein the workpiece is formed on a substrate, and after the workpiece formed on substrate has been etched, a further workpiece is formed on the substrate so as to be etched.