# US 5,350,453 A · Device for producing thin films of mixed metal oxides from organic metal compounds on a substrate > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 5,350,453 A - Document ID: US5350453A - Status: Granted - Kind: A - Application number: 07/920,458 - Filed: 1992-09-23 - Granted: 1994-09-27 - Earliest claimed: 1990-03-02 - Assignees: Hoechst Aktiengesellschaft - Inventors: Ernst-Gunther Schlosser - Web page: https://patentgrep.com/patent/US5350453A ## CPC - C23C 16/45514: {Mixing in close vicinity to the substrate} - C23C 16/40: Oxides - C23C 16/4485: {by evaporation without using carrier gas in contact with the source material (C23C16/4486 takes precedence)} - C23C 16/45585: {Compression of gas before it reaches the substrate} - Y10S 505/73: Vacuum treating or coating - Y10S 505/732: Evaporative coating with superconducting material - Y10S 505/734: From organometallic precursors, e.g. acetylacetonates - Y10S 505/786: Manufacturing system or apparatus for making high temperature, i.e. tc greater than 30 k superconductor product, device, article or stock, i.e. which system or apparatus does not itself contain a superconducting component - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - Y10S: TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS ## Abstract In the device for producing thin films of metal oxides from organic metal compounds on a substrate, there is a truncated pyramidal hollow body (3) in an evacuable housing (1). Disposed concentrically with respect to the axis of symmetry (16) of the hollow body (3) in its base (7) are at least three furnaces (8) which have reception devices (9) for the metal compounds (10) to be evaporated. The reception devices (9) are provided with guide pipes (11) which project into the hollow interior of the hollow body (3) and are inclined towards its axis of symmetry (16). The casing (12) of the truncated pyramid merges into a pipe (13) above whose end there is disposed a heatable reception device (5) for the substrate (4). A gas feed pipe (6) terminates in the hollow interior [sic] of the hollow body (3) between the guide pipes (11) and the end of the pipe (13). ## Claims ### Claim 1 Device for producing thin films of mixed metal oxides from organic metal compounds on a substrate, characterized in that there is, in an evacuable housing (1), a truncated frustum shaped hollow body (3) formed from a casting (12), having a base (7) and an axis of symmetry (16), in which there are disposed, on a circumference of a circle that is concentric with the axis of symmetry (16), a) at least three furnaces (8) in the base (7) of the hollow body which have reception devices (9) for the metal compounds (10) to be evaporated, which reception devices (9) are provided with guide pipes (11) which project into the hollow interior of the hollow body (3) and are inclined towards the axis of symmetry (16), b) a confluence pipe (13), into which the truncated frustum hollow body merges, having a first and second end, and above whose second end there is disposed a heatable reception device (5) for the substrate (4), and in the interior of the frustum shaped hollow body, a gas feed pipe terminates between the guide pipe (11) and the first end of the confluence pipe (13). ### Claim 2 (depends on 1) Device according to claim 1, characterized in that the furnaces (8) are disposed symmetrically on a circumference of a circle that is concentric with respect to the axis of symmetry (16) of the hollow body (3). ### Claim 3 (depends on 1, 2) Device according to one of claims 1 or 2, characterized in that a shutter is disposed between the hollow body (3) and the heated reception device (5) for the substrate (4). ### Claim 4 (depends on 1) Device according to claim 1, characterized in that the gas feed pipe (6) comprises a nozzle ring. ### Claim 5 (depends on 1) Device according to claim 1, characterized in that the hollow body (3) and the pipe (13) are provided with a temperature-control device (14). ### Claim 6 (depends on 1, 2, 3, 4, 5) Device according to one of claim 1 to 5, characterized in that baffle plates are disposed between the guide pipes (11). ### Claim 7 (depends on 2) Device according to claim 2, characterized in that the gas feed pipe (6) comprises a nozzle ring. ### Claim 8 (depends on 2) Device according to claim 2, characterized in that the hollow body (3) and the confluence pipe (13) are provided with a temperature-control device (14). ### Claim 9 (depends on 2) Device according to claim 2, characterized in that baffle plates are disposed between the guide pipes (11). ### Claim 10 (depends on 3) Device according to claim 3, characterized in that the gas feed pipe (6) comprises a nozzle ring. ### Claim 11 (depends on 3) Device according to claim 3, characterized in that the hollow body (3) and the confluence pipe (13) are provided with a temperature-control device (14). ### Claim 12 (depends on 3) Device according to claim 3, characterized in that baffle plates are disposed between the guide pipes (11). ### Claim 13 (depends on 4) Device according to claim 4, characterized in that the hollow body (3) and the confluence pipe (13) are provided with a temperature-control device (14). ### Claim 14 (depends on 4) Device according to claim 4, characterized in that baffle plates are disposed between the guide pipes (11). ### Claim 15 (depends on 5) Device according to claim 5, characterized in that baffle plates are disposed between the guide pipes (11).