# US 5,349,498 A · Integral extended surface cooling of power modules

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- Number: US 5,349,498 A
- Document ID: US5349498A
- Status: Granted
- Kind: A
- Application number: 07/995,444
- Filed: 1992-12-23
- Granted: 1994-09-20
- Earliest claimed: 1992-12-23
- Assignees: Hughes Aircraft Company
- Inventors: Herbert J. Tanzer; Gholam A. Goodarzi; Richard J. Olaveson
- Web page: https://patentgrep.com/patent/US5349498A

## CPC

- H10W 40/47: by flowing liquids, e.g. forced water cooling
- H10W 40/611: {Bolts or screws}
- H10W 40/641: {Snap-on arrangements, e.g. clips}
- H10W 40/235: {attached to package parts}
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10

## Abstract

The semiconductor wafer of the power module is mounted directly, separated only by thermal expansion control layers and insulator layers, on the metal base which has fins or pins integrally formed thereon. This module is mounted on a coolant fluid flow chamber so that the module mounting is not a thermal interface. In this way, maximum power module cooling is achieved with minimum fluid flow.

## Claims

### Claim 1

A power module cooling system comprising:
a cold plate comprising a fluid inlet and a fluid outlet, a channel interconnecting said fluid inlet and said fluid outlet, and a mounting face having an opening therein into said channel;
a power module disposed on said cold plate, said power module comprising a metallic base that is larger than said opening in said mounting face of said cold plate so that said metallic base overlies said cold plate around said opening to seal against said cold plate adjacent said opening, said metallic base comprising metallic fins that are disposed through said opening in said face of said cold plate into said channel so that coolant fluid flow through said cold plate passes said fins wherein said fins are secured to a side of said channel opposite said opening into said channel, said metallic base comprising a mounting face on said metallic base opposite said fins; and
a semiconductor wafer disposed on said mounting face of said metallic base so that heat generated in said semiconductor wafer moves directly through said metallic base and said fins into said coolant fluid in said channel.

### Claim 2 (depends on 1)

The system of claim 1 wherein said base is removably secured to said cold plate to provide for interchangeability of said base and said semiconductor wafer disposed thereon.

### Claim 3 (depends on 1)

The system of claim 1 wherein a cover is mounted on said base, said cover being positioned to extend over said semiconductor wafer.

### Claim 4 (depends on 3)

The system of claim 3 wherein said cover comprises dielectric material.

### Claim 5 (depends on 1)

The system of claim 1 wherein said power module is removably mounted on said mounting face of said cold plate.

### Claim 6 (depends on 1)

The system of claim 1 wherein a gasket is incorporated with said power module and said face of said cold plate which is used to assist in sealing against said cold plate adjacent said opening to eliminate coolant leaks out of said opening in said mounting face of said cold plate.

### Claim 7 (depends on 1)

The system of claim 1 wherein said semiconductor wafer comprises a plurality of layers to electrically insulate said wafer from said base and to accommodate for differences in thermal coefficients of expansion between said wafer and said base.