# US 5,348,839 A · Photodelineable coatings from hydrogen silsesquioxane resin

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- Number: US 5,348,839 A
- Document ID: US5348839A
- Status: Granted
- Kind: A
- Application number: 08/034,958
- Filed: 1993-03-22
- Granted: 1994-09-20
- Earliest claimed: 1991-04-22
- Assignees: Dow Corning Corporation
- Inventors: Loren A. Haluska; Keith W. Michael
- Web page: https://patentgrep.com/patent/US5348839A

## CPC

- G03F 7/0757: {Macromolecular compounds containing Si-O, Si-C or Si-N bonds (G03F7/0752 takes precedence)}
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)

## Abstract

Disclosed are compositions which are useful for forming photodelineable coatings on substrates. The compositions contain a solvent, hydrogen silsesquioxane resin and an initiator which generates free radicals upon exposure to radiation.

## Claims

### Claim 1

A liquid composition comprising a solvent, hydrogen silsesquioxane resin and an initiator which generates free radicals upon exposure to radiation.

### Claim 2 (depends on 1)

The composition of claim 1 wherein the initiator is dodecamethyl cyclohexasilane.

### Claim 3 (depends on 1)

The composition of claim 1 which contains between about 0.1 and about 50 weight percent solids of hydrogen silsesquioxane and initiator in the solvent.

### Claim 4 (depends on 1)

The composition of claim 1 wherein the solvent is selected from the group consisting of aromatic hydrocarbons, alkanes, ketones, esters, cyclic dimethylpolysiloxanes and glycol ethers.

### Claim 5 (depends on 1)

The composition of claim 1 wherein the initiator is present in the range of about 0.01 moles initiator per each (HSiO.sub.3/2) unit to about 1 mole initiator per each (HSiO.sub.3/2) unit.

### Claim 6 (depends on 1)

The composition of claim 1 wherein the initiator is a material containing Si--Si bonds which are activated by radiation to form volatile SiH compounds.

### Claim 7 (depends on 1)

The composition of claim 1 wherein the initiator is selected from the group consisting of peroxides, benzophenones, acetophenones, azodi (1,1-hexahydrobenzonitrile); azobisisobutyronitrile, and alpha,alpha-bis tertiary peroxydiisopropylbenzene.