# US 5,348,775 A · Production of PT/PZT/PLZT laser `direct write` patterns

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- Number: US 5,348,775 A
- Document ID: US5348775A
- Status: Granted
- Kind: A
- Application number: 08/014,778
- Filed: 1993-02-08
- Granted: 1994-09-20
- Earliest claimed: 1991-05-30
- Assignees: Northern Illinois University
- Inventors: Chhiu-Tsu Lin
- Web page: https://patentgrep.com/patent/US5348775A

## CPC

- C04B 41/009: {characterised by the material treated}
- C03C 17/25: by deposition from the liquid phase
- C03C 23/0025: {by a laser beam}
- C04B 41/46: with organic materials
- C04B 41/48: Macromolecular compounds
- C04B 41/82: with organic materials
- C04B 41/83: Macromolecular compounds
- C23C 26/02: applying molten material to the substrate
- H10N 30/078: by sol-gel deposition
- C03C 2217/23: Mixtures
- C03C 2218/11: from solutions or suspensions
- C03C 2218/32: After-treatment
- C04B 2111/00844: {for electronic applications}
- H10N 30/8548: {Lead-based oxides}
- Y10T 428/31678: Of metal
- C04B: LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE {(roofing granules E04D7/005)}; CERAMICS (devitrified glass-ceramics C03C10/00); REFRACTORIES; TREATMENT OF NATURAL STONE
- C03C: CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

This invention encompasses methods and reagents for making PT, PZT, and PLZT as well as their extrinsic ions doped powders and thin films. In particular, the invention includes methods for localized laser annealing of PT, PZT, PLZT films to the surface of materials to provide articles useful in electronic devices such as high value capacitors, optical switches, wave guides, and the like. A 15-25% by weight of PT/PZT/PLZT in about a 5-10% acetic acid solution having an effective wetting agent of a surfactant has been found to be a superior isolation for making both powders and thin films, especially thin films for laser writing.

## Claims

### Claim 1

A method for forming a design of a thin ferroelectric film on a solid surface comprising:
(a) providing a solution of about 15 to 25 percent by weight of lead titanate, lead zirconate titanate or lead lanthanum zirconate titanate in about 5-10% aqueous acetic acid solution having an effective wetting amount of a surfactant, wherein the titanium component of the solution is in the form of titanium acetate;
(b) spin-coating the solid surface with the solution of (a);
(c) drying the coating;
(d) annealing a portion of the lead titanate, lead zirconate titanate or lead lanthanum zirconate titanate to the solid surface by irradiating the dried spin-coated solid surface with a laser in the desired pattern; and
(e) washing the solid surface with a strong acid to remove lead titanate, lead zirconate titanate or lead lanthanum zirconate titanate not annealed by irradiation with the laser thereby leaving a pattern of the laser annealed lead titanate, lead zirconate titanate or lead lanthanum zirconate titanate on the solid surface.

### Claim 2 (depends on 1)

A method according to claim 1 wherein the solid surface comprises glass, quartz, platinum, gold, silver, sapphire, silicon, or ceramic material.

### Claim 3 (depends on 1)

A method according to claim 1 wherein the surfactant in a nonionic polyoxyalkylene surfactant.

### Claim 4 (depends on 1)

A method of claim 1 wherein the solution further contains acetate, acetylacetonate, or carbonate salts of a metal ion.

### Claim 5 (depends on 4)

A method according to claim 4 wherein the metal ion is selected from the group comprising chromium, iron, neodrymium, europium, praseodymium, molydbenum, ytterbium, terbium, manganese, tungston and vanadium.