# US 5,348,765 A · Method of forming composite articles from CVD gas streams and solid particles or fibers

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 5,348,765 A
- Document ID: US5348765A
- Status: Granted
- Kind: A
- Application number: 07/941,290
- Filed: 1992-09-04
- Granted: 1994-09-20
- Earliest claimed: 1986-03-07
- Assignees: Thermo Electron Corporation
- Inventors: Peter Reagan; Ann N. Scoville; Rebecca Leaf
- Web page: https://patentgrep.com/patent/US5348765A

## CPC

- C04B 35/80: Fibres, filaments, whiskers, platelets, or the like
- C04B 35/571: obtained from {Si-containing} polymer precursors {or organosilicon monomers}
- C04B 41/009: {characterised by the material treated}
- C04B 41/5059: {Silicon carbide}
- C04B 41/87: Ceramics
- C23C 16/01: on temporary substrates, e.g. substrates subsequently removed by etching
- C23C 16/045: {Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates}
- C23C 16/325: {Silicon carbide}
- C04B 2235/36: Glass starting materials for making ceramics, e.g. silica glass
- C04B 2235/3826: Silicon carbides
- C04B 2235/40: Metallic constituents or additives not added as binding phase
- C04B 2235/421: Boron
- C04B 2235/422: Carbon
- C04B 2235/5248: Carbon, e.g. graphite
- C04B: LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE {(roofing granules E04D7/005)}; CERAMICS (devitrified glass-ceramics C03C10/00); REFRACTORIES; TREATMENT OF NATURAL STONE
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)

## Abstract

A method for forming composite articles, particularly ceramic articles, from particles or fibers mixed in a thermally activated reactant gas stream. The particles or fibers are codeposited with material produced by chemical vapor deposition (CVD) onto a heated substrate until the desired thickness of composite is obtained. Removal of the substrate yields a near-net shaped codeposited composite article having a chemical vapor deposition produced matrix with particles or fibers embedded therein in a generally uniform distribution. The method provides high deposition rates, and the composite articles produced may have enhanced strength, thermal shock resistance, and corrosion resistance at elevated temperatures.

## Claims

### Claim 1

A method of forming a composite article comprising:
forming a mixture of a solid phase material and a reactant gas, said reactant gas being thermally activatable to produce chemical vapor deposition (CVD) vapors and other reaction products;
providing a substrate compatible with said reactant gas, said CVD vapors, said other reaction products, and said solid phase material;
thermally activating said reactant gas such that said gas reacts to produce said CVD vapors; and
codepositing said solid phase material and material from said CVD vapors onto said substrate to form a composite article consisting essentially of (i) a solid matrix formed by chemical vapor deposition of said material from said CVD vapors and (ii) said solid phase material dispersed within said solid matrix.

### Claim 2 (depends on 1)

A method as in claim 1 wherein said thermal activation comprises heating said substrate and contacting said heated substrate with said mixture.

### Claim 3

A method of forming a composite article comprising:
forming a mixture of a solid phase material and a reactant gas, said reactant gas being thermally activatable to produce chemical vapor deposition (CVD) vapors and other reaction products;
providing a substrate compatible with said reactant, gas, said CVD vapors, said other reaction products, and said solid phase material;
heating said substrate to a temperature sufficient to activate said reactant gas upon contact;
contacting said heated substrate with said mixture so that said reactant gas reacts to produce said CVD vapors; and
codepositing said solid phase material and material from said CVD vapors onto said substrate to form a composite article consisting essentially of (i) a solid matrix formed by chemical vapor deposition of said material from said CVD vapors and (ii) said solid phase material dispersed within said solid matrix.

### Claim 4 (depends on 3)

The method of claim 3 wherein said solid phase material comprises particles.

### Claim 5 (depends on 3)

The method of claim 3 wherein said solid phase material comprises fibers.

### Claim 6 (depends on 3)

A method as in claim 3 wherein said codeposition occurs at a rate of at least 50 mils per hour.

### Claim 7 (depends on 3)

A method as in claim 3 wherein said substrate is positioned in a reactor prior to heating thereof, and wherein said mixture is formed outside the reactor by combining a reactant gas with solid phase material from a solid phase feeder, said mixture thereafter being supplied to the reactor for contact with said substrate.

### Claim 8 (depends on 3)

A method as in claim 3 wherein said substrate is positioned in a reactor prior to heating of the substrate, and wherein said mixture is formed within said reactor.

### Claim 9 (depends on 3)

A method as in claim 3 wherein said substrate is positioned in a reactor prior to heating of the substrate, and wherein said solid phase material is preheated outside of said reactor and thereafter is supplied to said reactor.

### Claim 10 (depends on 3)

The method as recited in claim 3, further including selectively rotating said substrate in order to ensure uniform codeposition of said material from said CVD vapors and said solid phase material onto said substrate.
