# US 5,348,497 A · High voltage vaccum feed-through electrical connector

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- Number: US 5,348,497 A
- Document ID: US5348497A
- Status: Granted
- Kind: A
- Application number: 07/931,096
- Filed: 1992-08-14
- Granted: 1994-09-20
- Earliest claimed: 1992-08-14
- Assignees: Applied Materials, Inc.
- Inventors: Petru N. Nitescu
- Web page: https://patentgrep.com/patent/US5348497A

## CPC

- H01J 37/32577: {Electrical connecting means}
- H01R 13/53: Bases or cases for heavy duty; Bases or cases {for high voltage} with means for preventing corona or arcing
- H10P 72/72: using electrostatic chucks
- H01R 13/24: resilient; resiliently-mounted
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)
- H01R: ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

A high voltage contact assembly comprising two dielectric housing members adapted for fastening together, the first dielectric housing member having a first conductor inserted therein, the second dielectric housing member having a second conductor inserted therein and spring means sandwiched between the first conductor and the second conductor, the second conductor fastened to a high voltage cable member, such that, when the dielectric housing members are fastened together, the first conductor member extends above the surface of the first housing member. The contact assembly of the invention is useful for mounting in a base plate support for an electrostatic chuck in an etch chamber.

## Claims

### Claim 1

A high voltage vacuum feed-through connector assembly comprising:
a) a first conductor member inserted into a dielectric first housing member;
b) a second conductor member inserted into a dielectric second housing member;.
c) a conductive spring sandwiched between the first and second conductor members;
d) a high voltage cable fastened to said second conductor member;
e) two or more fasteners for joining said first and second housing members together so that, when fastened, said first conductor member extends above the surface of the first housing member, wherein said dielectric second housing member has a cone-shaped opening for said high voltage cable.

### Claim 2 (depends on 1)

A connector assembly according to claim 1 wherein said spring comprises a plurality of spring washers.

### Claim 3 (depends on 1)

A connector assembly according to claim 1 wherein said spring comprises a bellows spring.

### Claim 4 (depends on 2)

A connector assembly according to claim 2 wherein said conductor members are made of copper and said washer springs are made of copper beryllium alloy.

### Claim 5 (depends on 1)

A connector assembly according to claim 1 wherein said fasteners are screws inserted into sized openings in said dielectric housing members.

### Claim 6 (depends on 1)

A connector assembly according to claim 1 wherein said fasteners are screws inserted into sized openings in said dielectric housing members and wherein dielectric caps are inserted above the screw fasteners.

### Claim 7 (depends on 6)

A connector assembly according to claim 6 wherein said dielectric caps have extraction blind threaded holes therein.

### Claim 8 (depends on 1)

A reaction chamber base having a high voltage connector assembly of claim 1 mounted therein.

### Claim 9 (depends on 1)

In a vacuum chamber for etching a substrate having a cathode base for supporting an electrostatic chuck, said chuck having an insulated electrode surface for supporting the substrate to be etched at one end, and a chuck electrical contact for connecting an external source of HV power at the other end of said chuck, the improvement comprising a vacuum feed-through high voltage connector assembly of claim 1 mounted in said base opposite said chuck contact.

### Claim 10 (depends on 1)

In a vacuum chamber for etching a substrate having a bipolar electrostatic chuck, said chuck having two terminals respectively connected to the positive and negative electrodes of a HV source, the improvement comprising two high voltage connector assemblies of claim 1 mounted in said base opposite said terminals.