# US 5,347,870 A · Dual function system having a piezoelectric element > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 5,347,870 A - Document ID: US5347870A - Status: Granted - Kind: A - Application number: 08/155,347 - Filed: 1993-11-22 - Granted: 1994-09-20 - Earliest claimed: 1992-01-29 - Assignees: State University of New York - Inventors: Jeffrey J. Dosch; Roger W. Mayne; Daniel J. Inman - Web page: https://patentgrep.com/patent/US5347870A ## CPC - G01B 7/00: Measuring arrangements characterised by the use of electric or magnetic techniques - G01B 7/16: for measuring the deformation in a solid, e.g. by resistance strain gauge - G01L 1/16: using properties of piezoelectric devices - H10N 30/802: {Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits} - G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS - G01L: MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE (weighing G01G) - H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR ## Abstract Self sensing actuator system using a piezoelectric actuator device allows the device to perform both as an actuator and sensor. The sensor functions can be either measurements of stress or measurements of strain. The actuator can be used as a force generator or positioning device, both in open and closed loop configurations, and is useful for purposes ranging from dynamic damping to shape control (i.e., shaping or controlling deformation of a body). ## Claims ### Claim 1 A dual function system for producing a mechanical effect on a body and sensing a response thereto which comprises a piezoelectrically responsive element which both produces and senses mechanical effects, means for applying a first signal to said element for actuating said element to produce the mechanical effect on the body and for obtaining from said body via element piezoelectrically a second signal, and means for processing by additively combining said first and second signals for providing an output signal, said output signal representing the response of said element to said effect while said first signal is being applied. ### Claim 2 (depends on 1) The system according to claim 1 wherein said processing means includes means for processing said first and second signals for sensing the strain of the piezoelectric element on producing said effect so that said output signal corresponds to said strain. ### Claim 3 (depends on 1) The system according to claim 1 wherein said processing means includes means for processing said first and second signals for sensing the stress of the piezoelectric element in producing said effect so that said output signal corresponds to said stress. ### Claim 4 (depends on 1) The system according to claim 1 wherein said processing means includes means for processing said first and second signals so that said output signal corresponds to the rate of the stress of said element as said mechanical effect. ### Claim 5 (depends on 1) The system according to claim 1 wherein said processing means includes means for processing said first and second signals so that said output signal corresponds to the rate of strain of said element as said mechanical effect. ### Claim 6 A dual function system for producing a mechanical effect and sensing a response thereto, which comprises a piezoelectrically responsive element, means for applying the first signal to said element for actuating said element to produce said effect and for obtaining a second signal in response to said effect, means for processing said first and second signals for providing an output signal, said output signal representing the response of said element to said effect, and further comprising means responsive to said output signal for generating said first signal. ### Claim 7 A dual function system for producing a mechanical effect and sensing a response thereto, which comprises a piezoelectrically responsive element, means for applying the first signal to said element for actuating said element to produce said effect and for obtaining a second signal in response to said effect, means for processing said first and second signals for providing an output signal, said output signal representing the response of said element to said effect, and wherein said processing means comprises a bridge circuit having primary and reference legs, said element being connected in said primary leg, means in said primary and reference legs for respectively obtaining third and fourth signals of magnitude corresponding to the voltage across said element when said mechanical effect is a certain constant magnitude, and means for providing said output signals in accordance with the difference in said third and fourth signals when said first signal is applied to each of said legs. ### Claim 8 (depends on 7) The system according to claim 7 further comprising charge amplifiers in each of said legs. ### Claim 9 (depends on 7) The system according to claim 7 wherein said means for obtaining said third and fourth signals comprises a capacitor in said reference leg having a value corresponding to the internal capacitance of said element at a certain constant stress when said effect is stress. ### Claim 10 (depends on 7) The system according to claim 7 wherein said means for obtaining said third and fourth signals comprises a capacitor in said reference leg having a value corresponding to the internal capacitance of said element at a certain constant strain when said effect is strain. ### Claim 11 (depends on 7) The system according to claim 7 wherein said means for providing said third and fourth signals comprises a first capacitive voltage divider in said primary leg and a second capacitive voltage divider in said reference leg, said first and second dividers having in corresponding locations the internal capacitance of said element and a discrete capacitor having the value of said internal capacitance under said effect at said constant magnitude. ### Claim 12 (depends on 7) The system according to claim 7 wherein said difference providing means is connected at an output end of said legs and said first signal is applied at an input end of said legs, said input and output ends being opposite ends of said legs, and means responsive to said output signal for generating said first signal in accordance with a predetermined control function or algorithm. ### Claim 13 A self sensing piezoelectric actuator system which produces stress or strain, which comprises a piezoelectric device having first and second electrodes and a body of piezoelectric material, a source of voltage, a connection between said first electrode on said piezoelectric device and said source so that a portion of said voltage appears at said second electrode, first means presenting a certain impedance corresponding to the impedance of said device when under a predetermined stress or strain, second means including said device and connected to said second electrode thereof which also presents said impedance, and third means, including said first and second means, responsive to said portion of said voltage for sensing stress or strain in said body of piezoelectric material. ### Claim 14 (depends on 13) The system according to claim 13 wherein said first and second means includes circuits presenting capacitive reactance which in said first means includes a capacitor presenting the same capacitance as said internal capacitance under said predetermined stress or strain. ### Claim 15 (depends on 14) The system according to claim 14 wherein said first and second means are reference and primary legs of a bridge circuit, and said third means includes a summing circuit. ### Claim 16 (depends on 15) The system according to claim 15 further comprising means connected to said summing circuit for providing said source of voltage.