# US 5,347,226 A · Array spreading resistance probe (ASRP) method for profile extraction from semiconductor chips of cellular construction > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 5,347,226 A - Document ID: US5347226A - Status: Granted - Kind: A - Application number: 07/977,264 - Filed: 1992-11-16 - Granted: 1994-09-13 - Earliest claimed: 1992-11-16 - Assignees: National Semiconductor Corporation - Inventors: Walter A. Bachmann; Peggy A. Hale - Web page: https://patentgrep.com/patent/US5347226A ## CPC - G01R 1/067: Measuring probes - G01N 27/041: {of a solid body} - G01N 27/20: Investigating the presence of flaws - G01R 27/02: Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant (by measuring phase angle only G01R25/00) - Y10T 29/49002: Electrical device making - G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12) - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) - Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION ## Abstract A semiconductor scanning resistance probe which has a support structure formed on a top surface of a substrate to form a cantilever. The support structure has a plurality of openings which extend through the support structure from a connector end to a cone end. An outer surface of the support structure at one side of each opening is cone-shaped so that an apex of the cone forms the cone end. A probe tip is formed in each probe tip opening and along the surface of the support structure. The probe tips are placed on individual semiconductor devices to extract impurity profiles. ## Claims ### Claim 1 A semiconductor scanning resistance probe responsive to an external positioning and control device for generating a resistivity current in a semiconductor device, the semiconductor scanning resistance probe comprising: a semiconductor substrate; a cantilever formed on the semiconductor substrate, the cantilever having a plurality of projections and a corresponding plurality of probe tip openings, each projection having a distal end, each probe tip opening extending through the cantilever to the distal end of one projection; and a plurality of probes, each probe being formed within a corresponding one of the probe tip openings so that a portion of each probe extends beyond the distal end of said one projection, whereby the resistivity current flows between the probes when the plurality of probes are placed into contact with the semiconductor device by the external positioning and control device. ### Claim 2 (depends on 1) The semiconductor scanning resistance probe of claim 1 wherein the plurality of probe tip openings are located adjacent to the distal end of the cantilever. ### Claim 3 (depends on 1) The semiconductor scanning resistance probe of claim 1 and further comprising a strain gage formed on the cantilever at an intermediate position located between the proximate end and the distal end of the cantilever. ### Claim 4 (depends on 3) The semiconductor scanning resistance probe of claim 3 and further comprising: a plurality of probe conductive strips formed on the cantilever, each probe conductive strip contacting one probe; a layer of insulation material formed on the the cantilever, the plurality of probe conductive strips, and the plurality of probes. ### Claim 5 (depends on 4) The semiconductor scanning resistance probe of claim 4 wherein the layer of insulation material is further formed on the strain gage. ### Claim 6 (depends on 5) The semiconductor scanning resistance probe of claim 5 and further comprising a mirror formed on the layer of insulation material. ### Claim 7 (depends on 3) The semiconductor scanning resistance probe of claim 3 wherein the cantilever further comprises a strain gage opening formed therethrough at the intermediate position. ### Claim 8 (depends on 7) The semiconductor scanning resistance probe of claim 7 wherein the scanning resistance probe further comprises a pair of strain gage conductors formed on the cantilever and in the strain gage opening, the pair of strain gage conductors contacting the strain gage. ### Claim 9 (depends on 8) The semiconductor scanning resistance probe of claim 8 wherein the strain gage comprises a piezoelectric material. ### Claim 10 (depends on 1) The semiconductor scanning resistance probe of claim 1 and further comprising a mirror formed on the cantilever. ### Claim 11 A semiconductor scanning resistance probe responsive to an external positioning and control device for generating a resistivity current in a semiconductor device, the semiconductor scanning resistance probe comprising: a semiconductor substrate; a cantilever formed on the semiconductor substrate, the cantilever having a plurality of probe tip openings formed therethrough; and a plurality of probes, each probe being formed within a corresponding one of the probe tip openings so that a portion of each probe extends beyond the cantilever, whereby the resistivity current flows between probes when the plurality of probes are placed into contact with the semiconductor device by the external positioning and control device. ### Claim 12 A semiconductor scanning resistance probe responsive to an external positioning and control device for generating a resistivity current in a semiconductor device, the semiconductor scanning resistance probe comprising: a semiconductor substrate having a stepped inner surface and a plurality of first openings formed therethrough; a support structure formed on the stepped inner surface, the support structure having a plurality of projections and a corresponding plurality of probe tip openings, each projection extending through one of the first openings and having a distal end, each probe tip opening extending through the support structure to the distal end of one projection; and a plurality of probes, each probe being formed within a corresponding one of the probe tip openings so that a portion of each probe extends beyond the distal end of said one projection, whereby the resistivity current flows between probes when the plurality of probes are placed into contact with the semiconductor device by the external positioning and control device. ### Claim 13 (depends on 12) The semiconductor scanning resistance probe of claim 12 and further comprising a strain gage formed on the support structure at an intermediate position located between opposite sides of the support structure. ### Claim 14 (depends on 13) The semiconductor scanning resistance probe of claim 13 and further comprising: a plurality of probe conductive strips formed on the support structure, each probe conductive strip contacting one probe; a layer of insulation material formed on the support structure, the plurality of probe conductive strips, and the plurality of probes. ### Claim 15 (depends on 14) The semiconductor scanning resistance probe of claim 14 wherein the layer of insulation material is further formed on the strain gage. ### Claim 16 (depends on 15) The semiconductor scanning resistance probe of claim 15 and further comprising a mirror formed on the layer of insulation material. ### Claim 17 (depends on 16) The semiconductor scanning resistance probe of claim 16 wherein the support structure further comprises a strain gage opening formed therethrough at the intermediate position, wherein the semiconductor scanning resistance probe further comprises a pair of strain gage conductors formed on the support structure and in the strain gage opening to contact the strain gage. ### Claim 18 (depends on 17) The semiconductor scanning resistance probe of claim 17 wherein the strain gage comprises a piezoelectric material. ### Claim 19 (depends on 12) The semiconductor scanning resistance probe of claim 12 and further comprising a mirror formed on the support structure. ### Claim 20 A method of fabricating a semiconductor scanning resistance probe comprising the steps of: providing a semiconductor substrate having a top surface; forming a support structure having a plurality of probe tip openings, an outer surface, a proximate end, and a distal end and being formed on the top surface of the semiconductor substrate to produce a cantilever, each probe tip opening extending through the support structure from a trace end to a cone end, the outer surface being cone-shaped on one side of each probe tip opening so that an apex of the cone-shaped outer surface forms the cone end; and forming a plurality of probe tip means for conducting a probe current in response to the resistivity of the semiconductor device, each probe tip means corresponding to one of the plurality of probe tip openings and being formed within the corresponding one probe tip opening and on the outer surface of the support structure from the corresponding one probe tip opening to the proximate end, the probe tip means extending beyond the cone end of the support structure. ### Claim 21 A method of fabricating a semiconductor scanning resistance probe comprising the steps of: providing a semiconductor substrate; forming a plurality of probe tip openings in the semiconductor substrate, each probe tip opening having a side wall and a bottom side; forming a layer of support material on the semiconductor substrate, the layer of support material covering the sidewalls of each probe tip opening while leaving the bottom side of each probe tip opening uncovered, the layer of support material having a proximate end and a distal end; forming a layer of first conductive material on the support material and the substrate at the bottom side of each probe tip opening, the first conductive material covering the bottom side of each probe tip opening forming a probe tip; etching the layer of first conductive material to form a plurality of probe tip conductors; and etching the substrate to form a cantilever. ### Claim 22 (depends on 21) The method of claim 21 wherein each probe tip conductor connects the first conductive material formed in one probe tip opening to the proximate end of the layer of support material. ### Claim 23 (depends on 22) The method of claim 22 and further comprising the steps of: forming a strain gage opening in the semiconductor substrate; forming a layer of second conductive material within the strain gage opening to form a strain gage, the strain gage having an input end and a output end; forming a plurality of strain gage openings in the layer of support material, the plurality of strain gage openings exposing the input end and the output end of the strain gage; and wherein the layer of first conductive material is further etched to form an input trace and an output trace, the input trace forming an electrical contact with the input end of the strain gage and extending from the input end to the proximate end and the output trace forming an electrical contact with the output end of the strain gage and extending from the output end to the proximate end. ### Claim 24 (depends on 23) The method of claim 23 and further comprising the step of forming a layer of insulation material on the layer of support material, each probe tip trace, the input trace, and the output trace. ### Claim 25 (depends on 24) The method of claim 24 and further comprising the steps of: forming a layer of reflective material on the layer of insulation material; and etching the layer of reflective material to form a mirror. ### Claim 26 (depends on 24) The method of claim 24 wherein the layer of first conductive material is further etched to form a strain gage, the strain gage extending from the proximate end to an intermediate point between the proximate end and the distal end. ### Claim 27 (depends on 21) The method of claim 21 further comprising the steps of: forming a layer of reflective material on the layer of support material; and etching the layer of reflective material to form a mirror. ### Claim 28 A method of fabricating a semiconductor scanning resistance probe comprising the steps of: providing a semiconductor substrate; forming a plurality of probe tip openings in the semiconductor substrate, each probe tip opening having a side wall and a bottom side; forming a layer of support material on the semiconductor substrate, the layer of support material covering the sidewalls and the bottom side of each probe tip opening, the layer of support material having a proximate end and a distal end; forming a layer of first conductive material on the support material; etching the layer of first conductive material to form a plurality of probe tip conductors; etching the substrate to form a cantilever; and milling the layer of support material and the layer of first conductive material to form a probe tip. ### Claim 29 (depends on 28) The method of claim 28 wherein each probe tip conductor connects the first conductive material formed in one probe tip opening to the proximate end of the layer of support material. ### Claim 30 A method of fabricating a semiconductor scanning resistance probe comprising the steps of: providing a semiconductor substrate; forming a plurality of probe tip openings in the semiconductor substrate, each probe tip opening having a side wall and a bottom side; forming a layer of support material on the semiconductor substrate, the layer of support material covering the sidewalls of each probe tip opening while leaving the bottom side of each probe tip opening uncovered, the layer of support material having a side; forming a layer of first conductive material on the support material and the substrate at the bottom side of each probe tip opening, the first conductive material covering the bottom side of each probe tip opening forming a probe tip; etching the layer of first conductive material to form a plurality of probe tip conductors; and etching the substrate to form a diaphragm. ### Claim 31 (depends on 30) The method of claim 30 wherein each probe tip conductor connects the first conductive material formed in one probe tip opening to the side of the layer of support material. ### Claim 32 A method of fabricating a semiconductor scanning resistance probe comprising the steps of: providing a semiconductor substrate; forming a plurality of probe tip openings in the semiconductor substrate, each probe tip opening having a side wall and a bottom side; forming a layer of support material on the semiconductor substrate, the layer of support material covering the sidewalls and the bottom side of each probe tip opening, the layer of support material having a side; forming a layer of first conductive material on the support material; etching the layer of first conductive material to form a plurality of probe tip conductors; etching the substrate to form a diaphragm; and milling the layer of support material and the layer of first conductive material to form a probe tip. ### Claim 33 (depends on 32) The method of claim 32 wherein each probe tip conductor connects the first conductive material formed in one probe tip opening to a side of the support material.