# US 5,345,534 A · Semiconductor wafer heater with infrared lamp module with light blocking means

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- Number: US 5,345,534 A
- Document ID: US5345534A
- Status: Granted
- Kind: A
- Application number: 08/039,720
- Filed: 1993-03-29
- Granted: 1994-09-06
- Earliest claimed: 1993-03-29
- Assignees: Texas Instruments Incorporated
- Inventors: Habib N. Najm; Steve S. Huang; Cecil J. Davis; Robert T. Matthews
- Web page: https://patentgrep.com/patent/US5345534A

## CPC

- H10P 72/0436: {mainly by radiation}
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

A thin reflective cylindrical baffle [20] in a radiant lamp heater is provided in the space below a plurality of heating bulbs [2,4,6] (arranged in a center position and around a middle and outer ring) and above a quartz window [12]. The baffle diameter is such that it fits within the annular space between the middle [4] and outer [6]ring of bulbs. The baffle which blocks a predetermined amount of light generated by the lamp bulbs [20] allows improved controllability of wafer temperature profile--for a wafer heated by a radiant lamp heater.

## Claims

### Claim 1

A semiconductor wafer lamp heater comprising:
a source of light which includes a plurality of light bulbs, said bulbs being positioned so as to lie in and define substantially concentric first and second cylinders; and
a cylindrical baffle, said cylindrical baffle lying in and defining a third cylinder substantially concentric with said first and second cylinders, said third cylinder including a radius less than said first cylinder and greater than said second cylinder.

### Claim 2 (depends on 1)

A semiconductor wafer lamp heater as recited in claim 1 wherein said plurality of bulbs are mounted in an assembly, at least a portion of said assembly being coated with a light reflective material.

### Claim 3 (depends on 2)

A semiconductor wafer lamp heater as recited in claim 2 wherein said light reflective material is selected from the group consisting of gold or chrome.

### Claim 4 (depends on 2)

A semiconductor wafer lamp heater as recited in claim 2 wherein said assembly includes passageways capable of carrying a medium capable of cooling said assembly.

### Claim 5 (depends on 4)

A semiconductor wafer lamp heater as recited in claim 4 wherein said medium is selected from the group consisting of water, gas, or freon.

### Claim 6 (depends on 1)

A semiconductor wafer lamp heater as recited in claim 1 wherein said baffle includes at least one passageway capable of carrying a medium capable of cooling said baffle.

### Claim 7 (depends on 6)

A semiconductor wafer lamp heater as recited in claim 6 which further includes at least one pipe connected to said baffle, said at least one pipe being capable of allowing the transport of a cooling medium to said baffle.

### Claim 8 (depends on 6)

A semiconductor wafer lamp heater as recited in claim 6 wherein said baffle is coated on selected portions thereof with a light reflective material.

### Claim 9 (depends on 8)

A semiconductor wafer lamp heater as recited in claim 8 wherein said reflective material is selected from the group consisting of gold or chrome.

### Claim 10 (depends on 1)

A semiconductor wafer lamp heater as recited in claim 1 wherein said baffle comprises material selected from the group consisting of quartz, stainless steel, molybdenum or a combination thereof.