# US 5,345,464 A · Semiconductor laser

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- Number: US 5,345,464 A
- Document ID: US5345464A
- Status: Granted
- Kind: A
- Application number: 08/124,018
- Filed: 1993-09-21
- Granted: 1994-09-06
- Earliest claimed: 1992-12-21
- Assignees: Mitsubishi Denki Kabushiki Kaisha
- Inventors: Akira Takemoto
- Web page: https://patentgrep.com/patent/US5345464A

## CPC

- H01S 5/32: comprising PN junctions, e.g. hetero- or double- heterostructures (H01S5/34, H01S5/36 take precedence)
- H01S 5/2004: {Confining in the direction perpendicular to the layer structure}
- H01S 5/2275: {mesa created by etching}
- H01S 5/321: {having intermediate bandgap layers}
- H01S 5/3211: {characterised by special cladding layers, e.g. details on band-discontinuities}
- H01S 5/32391: {based on In(Ga)(As)P}
- H01S: DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL

## Abstract

A semiconductor laser includes a semiconductor substrate of a first conductivity type; a double heterojunction structure comprising a lower cladding layer of the first conductivity type disposed on the semiconductor substrate and having a first energy band gap, a band gap discontinuity reduction layer of the first conductivity type having a thickness from five to forty nanometers disposed on the lower cladding layer and having a second energy band gap, an undoped active layer disposed on the band gap discontinuity reduction layer and having a third energy band gap smaller than the first energy band gap, the second energy band gap being intermediate the first and third energy band gaps, and an upper cladding layer of a second conductivity type, opposite the first conductivity type, disposed on the active layer and having a fourth energy band gap larger than the third energy band gap, the double heterojunction structure having a ridge shape; a current confinement structure disposed on opposite sides of the double heterojunction structure for confining current flow to the double heterojunction structure; and first and second electrodes electrically contacting the semiconductor substrate and the upper cladding layer, respectively.

## Claims

### Claim 1

A semiconductor laser comprising:
a semiconductor substrate of a first conductivity type;
a double heterojunction structure comprising a lower cladding layer of the first conductivity type disposed on the semiconductor substrate and having a first energy band gap, a band gap discontinuity reduction layer of the first conductivity type having a thickness from five to forty nanometers disposed on the lower cladding layer and having a second energy band gap, an undoped active layer disposed on the band gap discontinuity reduction layer and having a third energy band gap smaller than the first energy band gap, the second energy band gap being intermediate the first and third energy band gaps, and an upper cladding layer of a second conductivity type, opposite the first conductivity type, disposed on the active layer and having a fourth energy band gap larger than the third energy band gap, the double heterojunction structure having a ridge shape;
a current confinement structure disposed on opposite sides of the double heterojunction structure for confining current flow to the double heterojunction structure; and
first and second electrodes electrically contacting the semiconductor substrate and the upper cladding layer, respectively.

### Claim 2 (depends on 1)

The semiconductor laser of claim 1 wherein the first conductivity type is p type.

### Claim 3 (depends on 1)

The semiconductor laser of claim 1 wherein the first conductivity type is n type.

### Claim 4 (depends on 1)

The semiconductor laser of claim 1 including a second band gap discontinuity reduction layer disposed between the active layer and the upper cladding layer and having an energy band gap intermediate the third and fourth energy band gaps and a thickness of five to forty nanometers.

### Claim 5 (depends on 1)

The semiconductor laser of claim 1 wherein the band gap discontinuity reduction layer comprises a plurality of laminated semiconductor films, each film having an energy band gap no larger than the first energy band gap and no smaller than the third energy band gap.

### Claim 6 (depends on 1)

The semiconductor laser of claim 1 wherein the energy band gap of the band gap discontinuity reduction layer varies continuously with position from the first energy band gap to the third energy band gap between the lower cladding layer and the active layer.

### Claim 7 (depends on 1)

The semiconductor laser of claim 1 wherein the current confinement structure comprises a pnpn thyristor structure.

### Claim 8 (depends on 1)

The semiconductor laser of claim 1 wherein the current confinement structure comprises a semi-insulating semiconductor material.

### Claim 9 (depends on 1)

The semiconductor laser of claim 1 wherein the upper and lower cladding layers are InP and the active and band gap discontinuity reduction layers are InGaAsP.

### Claim 10 (depends on 9)

The semiconductor laser of claim 9 wherein the band gap discontinuity reduction layer is In.sub.0.82 Ga.sub.0.18 As.sub.0.4 P.sub.0.6 and the active layer is In.sub.0.58 Ga.sub.0.42 As.sub.0.9 P.sub.0.1.

### Claim 11 (depends on 1)

The semiconductor laser of claim 1 including a contacting layer of the second conductivity type electrically contacting the upper cladding layer.

### Claim 12 (depends on 11)

The semiconductor laser of claim 11 including a second upper cladding layer of the second conductivity type interposed between and contacting the upper cladding layer and the contacting layer.

### Claim 13

A semiconductor laser comprising:
a semiconductor substrate of a first conductivity type;
a double heterojunction structure comprising a lower cladding layer of the first conductivity type disposed on the semiconductor substrate and having a first energy band gap, an undoped active layer disposed on the lower cladding layer and having a second energy band gap smaller than the first energy band gap, a band gap discontinuity reduction layer of a second conductivity type, opposite the first conductivity type, having a thickness from five to forty nanometers disposed on the active layer and having a third energy band gap, and an upper cladding layer of the second conductivity type, disposed on the band gap discontinuity reduction layer and having a fourth energy band gap, the third energy band being intermediate the second and fourth energy band gaps and the first energy band gap being larger than the second band gap, the double heterojunction structure having a ridge shape;
a current confinement structure disposed on opposite sides of the double heterojunction structure for confining current flow to the double heterojunction structure; and first and second electrodes electrically contacting the semiconductor substrate and the upper cladding layer, respectively.

### Claim 14 (depends on 13)

The semiconductor laser of claim 13 wherein the first conductivity type is p type.

### Claim 15 (depends on 13)

The semiconductor laser of claim 13 wherein the first conductivity type is n type.

### Claim 16 (depends on 13)

The semiconductor laser of claim 13 including a second band gap discontinuity reduction layer disposed between the active layer and the lower cladding layer and having an energy band gap intermediate the first and second energy band gaps and a thickness of five to forty nanometers.

### Claim 17 (depends on 13)

The semiconductor laser of claim 13 wherein the band gap discontinuity reduction layer comprises a plurality of laminated semiconductor films, each film having an energy band gap no larger than the first energy band gap and no smaller than the third energy band gap.

### Claim 18 (depends on 13)

The semiconductor laser of claim 13 wherein the energy band gap of the band gap discontinuity reduction layer varies continuously with position from the second energy band gap to the fourth energy band gap between the lower active layer and the upper cladding layer.

### Claim 19 (depends on 13)

The semiconductor laser of claim 13 wherein the current confinement structure comprises a pnpn thyristor structure.

### Claim 20 (depends on 13)

The semiconductor laser of claim 13 wherein the upper and lower cladding layers are InP and the active and band gap discontinuity reduction layers are InGaAsP.

### Claim 21 (depends on 20)

The semiconductor laser of claim 20 wherein the band gap discontinuity reduction layer is In.sub.0.82 Ga.sub.0.18 As.sub.0.4 P.sub.0.6 and the active layer is In.sub.0.58 Ga.sub.0.42 As.sub.0.9 P.sub.0.1.

### Claim 22 (depends on 13)

The semiconductor laser of claim 13 including a contacting layer of the second conductivity type electrically contacting the upper cladding layer.

### Claim 23 (depends on 22)

The semiconductor laser of claim 22 including a second upper cladding layer of the second conductivity type interposed between and contacting the upper cladding layer and the contacting layer.
