# US 5,345,080 A · Method of observing electron microscopic images and an apparatus for carrying out of the same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 5,345,080 A - Document ID: US5345080A - Status: Granted - Kind: A - Application number: 07/960,503 - Filed: 1992-10-13 - Granted: 1994-09-06 - Earliest claimed: 1991-10-15 - Assignees: Hitachi, Ltd. - Inventors: Yusuke Yajima; Masakazu Ichikawa; Hiroyuki Shinada - Web page: https://patentgrep.com/patent/US5345080A ## CPC - H01J 37/26: Electron or ion microscopes; Electron or ion diffraction tubes - H01J 37/045: {Beam blanking or chopping, i.e. arrangements for momentarily interrupting exposure to the discharge} - H01J 2237/24455: Transmitted particle detectors - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract An electron microscopic image observing method and an apparatus for carrying out the same enables the observation of an electron microscopic image of a specimen by irradiating the specimen with an electron beam and detecting the electron beam after it has transmitted through the specimen. The electron beam transmitted through the specimen is deflected so that the deflection thereof varies with time, and is allowed to pass through an aperture only when the deflection thereof is within a predetermined range of deflection, whereby the electron beam transmitted through the specimen and passed through the aperture is then detected. Thus, the electron microscopic image observing method and the apparatus for carrying out the same enables the observation of time-resolved electron microscopic images of a specimen having internal physical properties varying with time. ## Claims ### Claim 1 In an electron microscopic image observing method, wherein an electron beam is emitted so that the electron beam will pass through a specimen or through a region surrounding the specimen, and thereafter detected to form an electron microscopic image of the specimen, the improvement comprising the steps of: deflecting the electron beam after having transmitted through the specimen so that the deflection of the electron beam varies with time; and selectively allowing the electron beam having transmitted through the specimen to pass intermittently through an aperture only when the deflection of the electron beam transmitted through the specimen is within a predetermined range of deflection; wherein the electron beam is detected to form a time-resolved electron microscopic image after having transmitted through the specimen and passed intermittently through the aperture. ### Claim 2 (depends on 1) An electron microscopic image observing method according to claim 1, wherein a perturbation varying with time is applied to the specimen. ### Claim 3 (depends on 2) An electron microscopic image observing method according to claim 2, wherein the perturbation applied to the specimen is at least one perturbation selected from the group consisting of an electric field, a magnetic field, a current, a stress, heat, a particle beam, an electromagnetic wave and light. ### Claim 4 (depends on 3) An electron microscopic image observing method according to claim 3, wherein the deflection of the electron beam having transmitted through the specimen is within the predetermined range of deflection when the magnitude of the perturbation applied to the specimen coincides with a predetermined magnitude. ### Claim 5 (depends on 3) An electron microscopic image observing method according to claim 3, wherein the magnitude of the perturbation applied to the specimen is varied periodically. ### Claim 6 (depends on 3) An electron microscopic image observing method according to claim 3, wherein the deflecting step is performed so that the deflection of the electron beam transmitted through the specimen is varied periodically. ### Claim 7 (depends on 3) An electron microscopic image observing method according to claim 3, wherein the electron beam is converged before passing through the specimen or through the region surrounding the specimen. ### Claim 8 (depends on 2) An electron microscopic image observing method according to claim 2, wherein the deflection of the electron beam having transmitted through the specimen is within the predetermined range of deflection when the magnitude of the perturbation applied to the specimen coincides with a predetermined magnitude. ### Claim 9 (depends on 8) An electron microscopic image observing method according to claim 8, wherein the magnitude of the perturbation applied to the specimen is varied periodically. ### Claim 10 (depends on 8) An electron microscopic image observing method according to claim 8, wherein the deflecting step is performed so that the deflection of the electron beam transmitted through the specimen is varied periodically. ### Claim 11 (depends on 8) An electron microscopic image observing method according to claim 8, wherein the electron beam is converged before passing through the specimen or through the region surrounding the specimen. ### Claim 12 (depends on 2) An electron microscopic image observing method according to claim 2, wherein the magnitude of the perturbation applied to the specimen is varied periodically. ### Claim 13 (depends on 12) An electron microscopic image observing method according to claim 12, wherein the deflecting step is performed so that the deflection of the electron beam transmitted through the specimen is varied periodically. ### Claim 14 (depends on 12) An electron microscopic image observing method according to claim 12, wherein the electron beam is converged before passing through the specimen or through the region surrounding the specimen. ### Claim 15 (depends on 2) An electron microscopic image observing method according to claim 2, wherein the deflection of the electron beam transmitted through the specimen is varied periodically. ### Claim 16 (depends on 15) An electron microscopic image observing method according to claim 15, wherein the period of detection of the electron beam transmitted through the specimen and selectively allowed to pass through the aperture is equal to that of the periodic variation of the perturbation applied to the specimen. ### Claim 17 (depends on 16) An electron microscopic image observing method according to claim 16, wherein the period of variation of the deflection of the electron beam transmitted through the specimen is equal to that of the periodic variation of the perturbation applied to the specimen. ### Claim 18 (depends on 17) An electron microscopic image observing method according to claim 17, wherein the electron beam is converged before passing through the specimen or through the region surrounding the specimen. ### Claim 19 (depends on 16) An electron microscopic image observing method according to claim 16, wherein the electron beam is converged before passing through the specimen or through the region surrounding the specimen. ### Claim 20 (depends on 2) An electron microscopic image observing method according to claim 2, wherein the electron beam is converged before passing through the specimen or through the region surrounding the specimen. ### Claim 21 (depends on 1) An electron microscopic image observing method according to claim 1, wherein the deflecting step is performed so that the deflection of the electron beam transmitted through the specimen is varied periodically. ### Claim 22 (depends on 21) An electron microscopic image observing method according to claim 21, wherein the electron beam is converged before passing through the specimen or through the region surrounding the specimen. ### Claim 23 (depends on 1) An electron microscopic image observing method according to claim 1, wherein the electron beam is converged before passing through the specimen or through the region surrounding the specimen. ### Claim 24 (depends on 23) An electron microscopic image observing method according to claim 23, wherein the deflecting step is performed so that the converged electron beam having transmitted through the specimen or through the region surrounding the specimen scans the entire area to be scanned within the specimen or within the region surrounding the specimen. ### Claim 25 An electron microscopic image observing apparatus which irradiates a specimen with a converged electron beam, detects the electron beam transmitted through the specimen and forms an electron microscopic image of the specimen for observation, said electron microscopic image observing apparatus comprising: a deflector for periodically deflecting the electron beam having transmitted through the specimen; an aperture diaphragm having an aperture and disposed so as to allow the electron beam to pass intermittently through the aperture only when the deflection of the electron beam is within a predetermined range of deflection; and detecting means for detecting the electron beam having passed intermittently through the aperture. ### Claim 26 (depends on 25) An electron microscopic image observing apparatus according to claim 25, further comprising a scanning means for moving a position to be irradiated with the electron beam on the surface of ht specimen for scanning. ### Claim 27 (depends on 26) An electron microscopic image observing apparatus according to claim 26, wherein said scanning means is an electrostatic or magnetic electron beam deflecting means. ### Claim 28 (depends on 27) An electron microscopic image observing apparatus according to claim 27 further comprising a perturbing means for applying a perturbation to the specimen. ### Claim 29 (depends on 26) An electron microscopic image observing apparatus according to claim 26, wherein said scanning means is a specimen moving means for moving the specimen relative to the electron beam. ### Claim 30 (depends on 29) An electron microscopic image observing apparatus according to claim 29 further comprising a perturbing means for applying a perturbation to the specimen. ### Claim 31 (depends on 26) An electron microscopic image observing apparatus according to claim 26 further comprising a perturbing means for applying a perturbation to the specimen. ### Claim 32 (depends on 25) An electron microscopic image observing method according to claim 25 further comprising a perturbing means for applying a perturbation to the specimen. ### Claim 33 (depends on 32) An electron microscopic image observing apparatus according to claim 32, wherein said perturbing means is capable of applying a perturbation, the magnitude of which varies with time, to the specimen. ### Claim 34 (depends on 33) An electron microscopic image observing apparatus according to claim 33, wherein the magnitude of the perturbation varies periodically with time.