# US 5,345,074 A · Semiconductor light source > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 5,345,074 A - Document ID: US5345074A - Status: Granted - Kind: A - Application number: 08/035,215 - Filed: 1993-03-22 - Granted: 1994-09-06 - Earliest claimed: 1990-11-13 - Assignees: Sumitomo Electric Industries, Ltd. - Inventors: Ichiro Tonai; Yoshiki Kuhara - Web page: https://patentgrep.com/patent/US5345074A ## CPC - H10F 77/334: {for shielding light, e.g. light blocking layers or cold shields for infrared detectors} - H10F 30/221: the potential barrier being a PN homojunction - H10F 30/2215: {the devices comprising active layers made of only Group III-V materials} - H10F 30/223: the potential barrier being a PIN barrier - H10F 77/337: {using interference filters, e.g. multilayer dielectric filters} - H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION ## Abstract A semiconductor light source for transmitting light signals of digital or analog data having a laser diode and a photodiode for monitoring the output power of the laser diode. The driving current of the laser diode is adjusted by the photocurrent of the monitoring photodiode. The photodiode has a light receiving region at a center enclosed by an annular electrode and a light non-receiving region outside the annular electrode. If leak light beams entered the non-receiving region, delayed photocurrent is produced. The delayed photocurrent misleads the control of the laser diode. This invention provides a non-receiving region of the photodiode with a dielectric layer for reflecting or absorbing light beams in order to preventing the light beams from producing the delayed photocurrent. ## Claims ### Claim 1 A semiconductor light source comprising: a laser diode for emitting light beams from a front end and from a rear end, a photodiode for monitoring light beams emitted from the rear end of the laser diode, a header for supporting the laser diode and the photodiode, and leads fitted to the header for supplying driving currents to the laser diode and for extracting photocurrents from the photodiode, wherein the photodiode has a substrate with two surfaces, epitaxial layers grown on a surface of the substrate, a pn-junction produced at a center of the epitaxial layers, an electrode formed on the epitaxial layers above the pn-junction, another electrode deposited on the other surface of the substrate, a light receiving region defined by the pn-junction, and a peripheral non-receiving region outside the pn-junction, wherein the photodiode has a dielectric layer on the non-receiving region for reflecting or absorbing light beams irradiating thereon. ### Claim 2 A semiconductor light source comprising: a laser diode for emitting light beams from a front end and from a rear end, a photodiode for monitoring the light beams emitted from the rear end of the laser diode, a header with an upper surface, a bottom surface and a protrusion on the upper surface for supporting the photodiode on the upper surface and the laser diode on a side of the protrusion, leads fitted to the header for supplying driving currents to the laser diode and for extracting photocurrents from the photodiode, a cap with a window fixed on the upper surface of the header, and a lens fitted in the window, wherein the lens, the laser diode chip and the photodiode chip are aligned along a normal of the upper surface of the header, wherein the photodiode has a substrate with an upper surface and a bottom surface, epitaxial layers grown on the substrate, a pn-junction produced at a center of the epitaxial layers, an electrode formed on the epitaxial layers above the pn-junction, another electrode formed on the bottom surface of the substrate, an light receiving region defined by the pn-junction, and a peripheral non-receiving region outside the pn-junction. wherein the photodiode has a dielectric layer on the non-receiving region for reflecting or absorbing light beams irradiating thereon. ### Claim 3 (depends on 2) A semiconductor light source as claimed in claim 2, wherein the photodiode chip inclines to the surface of the header in order to prohibit light beams reflected on the photodiode chip from returning the laser diode and perturbing oscillation of the laser. ### Claim 4 (depends on 3) A semiconductor light source as claimed in claim 3, wherein the inclination of a normal on the photodiode chip to an extension of the laser diode surface is between 5 degrees and 20 degrees. ### Claim 5 (depends on 2) A semiconductor light source as claimed in claim 2, wherein the dielectric layer formed on the non-receiving region is a dielectric multilayer having alternating repetition of two sublayers with different refractive indices and thicknesses and the products of the thicknesses by the refractive indices of the sublayers are one fourth of the wavelength of the light. ### Claim 6 (depends on 5) A semiconductor light source as claimed in claim 5, wherein the materials of the sublayers are two selected from the group consisting of SiN, SiOn, a-Si, TiN and AlN. ### Claim 7 (depends on 2) A semiconductor light source as claimed in claim 2, wherein the dielectric layer formed on the no-receiving region has high absorption coefficient for the light emitted by the laser. ### Claim 8 (depends on 5) A semiconductor as claimed in claim 5, wherein the lens is a spherical lens. ### Claim 9 A semiconductor light source comprising: a laser diode for emitting light beams from a front end and from a rear end, a photodiode for monitoring the light beams emitted from the rear end of the laser diode, a header with an upper surface, a bottom surface and a protrusion on the upper surface for supporting the photodiode on the-upper surface and the laser diode on a side of the protrusion, leads fitted to the header for supplying driving currents to the laser diode and for extracting photocurrents from the photodiode, a cap with a window fixed on the upper surface of the header, and a lens fitted in the window, wherein the lens, the laser diode chip and the photodiode chip are aligned along a normal of the upper surface of the header, wherein the photodiode has an n.sup.+ -type InP substrate with an upper surface and a bottom surface, an undoped InP buffer layer epitaxially grown on the InP substrate, an undoped InGaAs receiving layer epitaxially grown on the InP buffer layer, an undoped InP window layer epitaxially grown on the InGaAs receiving layer, a pn-junction produced by diffusing zinc at a center of the InP window layer and the InGaAs receiving layer, an electrode formed on the InP window layer above the pn-junction, another electrode formed on the bottom surface of the InP substrate, an light receiving region defined by the pn-junction, and a peripheral non-receiving region outside the pn-junction, wherein the photodiode has a dielectric layer on the non-receiving region for reflecting or absorbing light beams irradiating thereon. ### Claim 10 (depends on 9) A semiconductor light source as claimed in claim 9, wherein the dielectric layer formed on the non-receiving region is a dielectric multilayer having alternating repetition of two sublayers with different refractive indices and thicknesses and the products of the thicknesses by the refractive indices of the sublayers are one fourth of the wavelength of the light. ### Claim 11 (depends on 10) A semiconductor light source as claimed in claim 10, wherein the materials of the sublayers are two selected from the group consisting of SiN, SiOn, a-Si, TiN and AlN. ### Claim 12 (depends on 10) A semiconductor light source as claimed in claim 10, wherein the sublayers are SiN and a-Si, the SiN sublayer has a thickness of 215 nm and a refractive index of 1.8, the a-Si sublayer has a thickness of 120 nm and a refractive index of 3.2 for the light of a wavelength of 1540 nm. ### Claim 13 (depends on 10) A semiconductor light source as claimed in claim 10, wherein the receiving region of the photodiode is covered with an antireflection layer which is transparent to the light emitted by the laser. ### Claim 14 (depends on 13) A semiconductor light source as claimed in claim 13, wherein the antireflection layer is a SiON film deposited by a CVD method. ### Claim 15 (depends on 10) A semiconductor light source as claimed in claim 10, wherein the photodiode chip inclines to the surface of the header in order to prohibit the light beams reflected on the photodiode chip from returning the laser diode and perturbing oscillation of the laser. ### Claim 16 (depends on 15) A semiconductor light source as claimed in claim 15, wherein the inclination of a normal on the photodiode chip to an extension of the laser diode surface is between 5 degrees and 20 degrees. ### Claim 17 (depends on 15) A semiconductor light source as claimed in claim 15, wherein the inclination of a normal on the photodiode chip to an extension of the laser diode surface is in the neighborhood of 15 degrees. ### Claim 18 (depends on 10) A semiconductor light source as claimed in claim 10, wherein the dielectric layer formed on the non-receiving region has high absorption coefficient for the light emitted by the laser.