# US 5,344,677 A · Photochemically stable deep ultraviolet pellicles for excimer lasers

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- Number: US 5,344,677 A
- Document ID: US5344677A
- Status: Granted
- Kind: A
- Application number: 07/936,758
- Filed: 1992-08-27
- Granted: 1994-09-06
- Earliest claimed: 1992-08-27
- Inventors: Gilbert H. Hong
- Web page: https://patentgrep.com/patent/US5344677A

## CPC

- G03F 1/62: Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
- G03F 1/64: characterised by the frames, e.g. structure or material, including bonding means therefor
- Y10T 428/31544: Addition polymer is perhalogenated
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

An embodiment of the present invention is a pellicle for use on a photomask reticle used in conjunction with deep ultraviolet light wavelengths. The membrane of the pellicle comprises a purified fluoropolymer that has been spin coated on a substrate of nitrocellulose and then separated and mounted on an aluminum frame. The aluminum frame has vents that filter air of contaminants and which allow an equalization of air pressure on both sides of the pellicle membrane when a peel-off backliner is in place on the opposite side of the frame. A permanent bond is made between the membrane and frame and a sticky adhesive is used to keep the backliner on the frame until peel-off. The sticky adhesive is such that the backliner may be re-attached a plurality of times.

## Claims

### Claim 1

A deep ultraviolet pellicle, comprising:
a perimeter frame having an inside cavity and a first and a second surface that respectively lie in first and second planes which, together with the frame perimeter, completely bound the volume of said inside cavity;
a film membrane attached to said first surface of the frame for sealing out the outside environment from said inside cavity; and
particle trapping vent means including a channel along the length of the frame with holes at opposite ends of said channel, one hole leading from inside of the pellicle to said channel and one from the outside of the pellicle to said channel for relieving air pressure differences and excluding particles in air passing through from entering said inside cavity from the outside environment.

### Claim 2 (depends on 1)

The pellicle of claim 1, wherein:
the vent means further comprises a filter material disposed within said channel through which said passing air must transition.

### Claim 3 (depends on 1)

The pellicle of claim 1, wherein:
the vent means further comprises a sticky adhesive liner in said channel for trapping particles in said passing air.

### Claim 4 (depends on 1)

The pellicle of claim 1, wherein:
said channel has a zig-zag course for trapping air particles.

### Claim 5 (depends on 1)

The pellicle of claim 1, further comprising:
a stiff peel-off backliner that is secured to the perimeter frame with a sticky adhesive constituted to permit multiple cycles of detachment and reattachment of the perimeter frame to backliner, wherein robotic manipulations of the pellicle are assisted.

### Claim 6 (depends on 1)

The pellicle of claim 1, wherein:
the film membrane comprises a fluoropolymer material.

### Claim 7

A pellicle suitable for operation in the deep ultraviolet range of 190-500 nanometers, comprising:
a perimeter frame having an inside cavity and a first and a second surface that respectively lie in first and second planes which, together with the frame perimeter, completely bound the volume of said inside cavity; and
a membrane 0.5 to three micrometers thick attached to said first surface of the frame comprising a per-fluoro-cyclo-oxy-aliphatic-homopolymer.

### Claim 8 (depends on 7)

The pellicle of claim 7, further comprising:
vent means for relieving air pressure differences between said inside cavity and the environment outside the pellicle and for protecting the membrane from rupture.

### Claim 9

A deep ultraviolet pellicle, comprising:
a perimeter frame having an inside cavity and a first and a second surface that respectively lie in first and second planes which, together with the frame perimeter, completely bound the volume of said inside cavity;
a film membrane attached to said first surface of the frame; and
vent means comprising a channel disposed within the frame and a hole between said channel and said inside cavity and a hole between said channel and the environment outside the pellicle, and a micron pore-size filter material that includes polytetrafluoroethylene for relieving air pressure differences between said inside cavity and the environment outside the pellicle.

### Claim 10 (depends on 9)

The pellicle of claim 9, wherein:
the film membrane comprises a fluoropolymer material.