# US 5,344,615 A · Wet-process apparatus

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- Number: US 5,344,615 A
- Document ID: US5344615A
- Status: Granted
- Kind: A
- Application number: 08/136,050
- Filed: 1993-10-14
- Granted: 1994-09-06
- Earliest claimed: 1991-11-07
- Assignees: Mitsubishi Denki Kabushiki Kaisha
- Inventors: Motonori Yanagi; Cozy Ban; Takaaki Fukumoto
- Web page: https://patentgrep.com/patent/US5344615A

## CPC

- C01B 21/0411: {Chemical processing only}
- B01L 1/00: Enclosures; Chambers (provided with manipulation devices or glove boxes B25J21/00)
- C01B: NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; {METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C}
- B01L: CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE

## Abstract

The present invention provides a wet-processing apparatus comprising a chamber having a working space, means for wet processing in the working space, means for supplying nitrogen gas in fluid communication with the chamber, a nitrogen gas outlet located in a wall of the chamber, means for cleaning nitrogen gas by removing contaminants mixed therewith located in an area of the chamber downstream of the working space and upstream of the nitrogen gas outlet and having a contaminated gas inlet and a treated gas outlet in fluid communication with the chamber, means for diverting gas in the chamber located downstream of the treated gas outlet and upstream of the nitrogen gas supplying means, the means for diverting gas having a first position providing egress of treated gas from the chamber through the nitrogen gas outlet while inhibiting fluid communication to other parts of the chamber and a second position permitting fluid communication and recirculation of the treated gas to other parts of the chamber while preventing egress of the treated gas through the nitrogen gas outlet, and means for circulating nitrogen gas in the chamber.

## Claims

### Claim 1

A wet-processing apparatus comprising:
a chamber, having:
a working space;
means for wet processing in said working space;
means for supplying nitrogen gas in fluid communication with said chamber;
a nitrogen gas outlet located in a wall of said chamber;
means for cleaning nitrogen gas by removing contaminants mixed therewith located in an area of said chamber downstream of said working space and upstream of said nitrogen gas outlet and having a contaminated gas inlet and a treated gas outlet in fluid communication with said chamber;
means for diverting gas in the chamber located downstream of said treated gas outlet and upstream of said nitrogen gas supplying means, said means for diverting gas having a first position providing egress of treated gas from said chamber through said nitrogen gas outlet while inhibiting fluid communication to other parts of said chamber and a second position permitting fluid communication and recirculation of said treated gas to other parts of said chamber while preventing egress of said treated gas through said nitrogen gas outlet; and
means for circulating nitrogen gas in said chamber.

### Claim 2 (depends on 1)

An apparatus as claimed in claim 1 wherein said nitrogen-gas cleaning means includes a pH-control element including, in series, a filler for maximizing gas/liquid contact area, a nozzle member for supplying a pH-controlling agent, and a demister, and an aqueous-alkali-solution supply means for cleaning acid mist from the nitrogen gas.

### Claim 3 (depends on 2)

An apparatus as claimed in claim 2 where said nitrogen-gas cleaning means further includes a plurality of nozzle members and a pH-controlling solution reception pan located under said nozzle members to collect said solution.

### Claim 4 (depends on 1)

An apparatus as claimed in claim 1 where said nitrogen gas circulation means is a fan.

### Claim 5 (depends on 1)

An apparatus as claimed in claim 1 further including a cleaning filter located within said chamber downstream of and in fluid communication with said nitrogen gas circulating means.

### Claim 6 (depends on 1)

An apparatus as claimed in claim 1 wherein said nitrogen gas circulating means is in fluid communication with said nitrogen gas cleaning means.

### Claim 7 (depends on 1)

An apparatus as claimed in claim 1 wherein said nitrogen gas circulating means is in fluid communication with said contaminated gas inlet.

### Claim 8 (depends on 1)

An apparatus as claimed in claim 1 wherein said nitrogen gas circulating means is in fluid communication with said nitrogen gas supplying means.

### Claim 9 (depends on 1)

An apparatus as claimed in claim 1 wherein said means for diverting gas comprises valve means.

### Claim 10 (depends on 1)

An apparatus as claimed in claim 1 wherein said valve means includes a damper.

### Claim 11 (depends on 10)

An apparatus as claimed in claim 10 wherein said damper is located intermediate said nitrogen gas outlet and said means for supplying nitrogen.

### Claim 12 (depends on 1)

An apparatus as claimed in claim 1 wherein said nitrogen gas outlet includes a closure device.

### Claim 13 (depends on 1)

An apparatus as claimed in claim 1 wherein said means for gas diverting arrangement includes a closure device in said outlet and a damper located intermediate said nitrogen gas outlet and said means for supplying nitrogen gas.