# US 5,344,236 A · Method for evaluation of quality of the interface between layer and substrate

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 5,344,236 A
- Document ID: US5344236A
- Status: Granted
- Kind: A
- Application number: 07/824,373
- Filed: 1992-01-23
- Granted: 1994-09-06
- Earliest claimed: 1992-01-23
- Inventors: Iiya M. Fishman
- Web page: https://patentgrep.com/patent/US5344236A

## CPC

- G01N 25/72: Investigating presence of flaws
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)

## Abstract

A method for the quantitative and qualitative evaluation of a nonuniform interface between a layer and a substrate is disclosed wherein thermal excitation is provided by irradiating the layer and thermal relaxation responsive to this thermal excitation is measured. The measured thermal relaxation is compared to the expected values, obtained from a model derived for the quantitative description of the process of thermal relaxation. The fraction of the deteriorated area of the interface is obtained from the portion of the thermal relaxation which diverges from the expected values.

## Claims

### Claim 1

A method for evaluation of the quality of the interface between a layer disposed on a substrate, said interface being nonuniform in adhesion of said layer and said substrate, comprising the steps of:
providing a model of expected values for quantitative description of the process of thermal relaxation in the nonuniform interface between layer and substrate;
irradiating said layer with a plurality of laser beams to provide a non-uniform thermal excitation across said layer;
measuring thermal relaxation of said thermal excitation;
comparing said thermal relaxation of said thermal excitation with said expected values for the later stage of the thermal process in said interface obtained from said model;
evaluating mismatch of said layer with said substrate by selecting the portion of said thermal relaxation that diverges from the expected values.

### Claim 2 (depends on 1)

The method of claim 1 wherein said nonuniform thermal excitation is periodic.

### Claim 3 (depends on 1)

The method of claim 1 where said step of irradiating to provide thermal excitation is a transient grating.

### Claim 4 (depends on 3)

The method of claim 3 wherein said transient grating results from concurrent irradiation of said layer by said laser beams including two coherent exciting beams of radiation derived from a first radiation source.

### Claim 5 (depends on 4)

The method of claim 4 wherein said thermal relaxation is measured by irradiating said layer by a third beam of probe radiation and detecting of a diffracted component of said third beam, said third beam being temporally delayed relative to said two coherent exciting beams.

### Claim 6 (depends on 5)

The method of claim 5 wherein said third beam of probe radiation is derived from said first radiation source.

### Claim 7 (depends on 5)

The method of claim 5 wherein said third beam is obtained from another radiation source, said another radiation source non coherent with said first radiation source.

### Claim 8 (depends on 5)

The method of claim 5 wherein said step of irradiating said layer by a third beam is accomplished with said third beam of probe radiation incident on said layer, said layer being substantially transparent to said probe radiation.

### Claim 9 (depends on 5)

The method of claim 5 wherein said step of irradiating said layer by a third beam is accomplished with said third beam of probe radiation incident on said substrate, said substrate being substantially transparent to said probe radiation.