# US 5,343,937 A · Thermal control of concentric tube liquid source gas lines

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- Number: US 5,343,937 A
- Document ID: US5343937A
- Status: Granted
- Kind: A
- Application number: 07/856,816
- Filed: 1992-03-24
- Granted: 1994-09-06
- Earliest claimed: 1989-04-24
- Assignees: Micron Technology, Inc.
- Inventors: Timothy D. Gross
- Web page: https://patentgrep.com/patent/US5343937A

## CPC

- F16L 39/00: Joints or fittings for double-walled or multi-channel pipes or pipe assemblies {(quick-acting joints for double-walled or multi-channel pipes or pipe assemblies F16L37/56)}
- Y10T 137/6416: With heating or cooling of the system
- Y10T 137/6579: Circulating fluid in heat exchange relationship
- F16L: PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

A double containment liquid source gas line uses an outer annular chamber which functions as a safety containment housing and a thermal control liner. The thermal control is accomplished by providing hot water and pumping the water in a closed loop configuration. The water serves to accurately and reliably control temperature of liquid source gas in the gas line. The water is in a closed loop system, so that, by providing leak detection equipment on the water line, faults in either chamber may be rapidly detected.

## Claims

### Claim 1

Fluid transfer line having fluid supply and fluid discharge connections for a working fluid, and providing safety containment of a working fluid which is discharged from the line in a gaseous state, characterized by:
a) concentric inner and outer chambers, configured such that, if the inner chamber develops a breach in its integrity, the inner chamber leaks to the outer chamber or the outer chamber leaks to the inner chamber, depending on the relative pressures of the inner and outer chambers, and the outer chamber contains any fluid which may leak from the inner chamber;
b) working fluid supply and discharge connections communicating with the inner concentric chamber;
c) the working fluid and discharge connections and the inner concentric chamber configured so as to establish working fluid flow in a downstream direction;
d) the inner concentric chamber not communicating with the outer concentric chamber during a normal mode of operation;
e) thermal control fluid inlet and outlet connections on the outer concentric chamber, said inlet being located at a location on the outer concentric chamber downstream of the outlet connection, thereby permitting a thermal control fluid to flow in the outer concentric chamber from the inlet connection to the outlet connection in an upstream direction with respect to the working fluid, the thermal control fluid comprising hot water and the outer chamber being used to flow the hot water around the inner chamber;
f) a pump for causing the thermal control fluid to flow in said upstream direction;
g) temperature maintenance means for bringing the thermal control fluid to a temperature which will maintain the thermal control fluid at a predetermined temperature when it reaches the thermal control fluid inlet connection, the temperature maintenance means being a water heater;
h) means to detect a breach in the integrity of the inner chamber, including means for detecting presence of the working fluid within the outer concentric chamber, whereby the detection of the working fluid within the outer concentric chamber is used as indicator of failure and
i) said working fluid, the working fluid being a liquid source gas.

### Claim 2 (depends on 1)

Fluid transfer line as described in claim 1, further characterized by:
said means for detecting presence of the working fluid within the outer concentric chamber including a leak detector for detecting a leak between the chamber.

### Claim 3 (depends on 2)

Fluid transfer line as described in claim 2, further characterized by:
the leak detector being a pressure sensor attached to the outer chamber.

### Claim 4 (depends on 2)

Fluid transfer line as described in claim 2, further characterized by:
the leak detector being a gas detector attached to the outer chamber.

### Claim 5 (depends on 3)

Fluid transfer line as described in claim 3, further characterized by:
pressure adjustment means for controlling pressure in the outer chamber in order to effect a leak check of the chambers.

### Claim 6 (depends on 5)

Fluid transfer line as described in claim 5, further characterized by:
the pressure adjustment means establishing a water pressure and the leak detector including means to measure rate of change of the water pressure in order to detect a failure in the integrity of the inner and outer chambers.

### Claim 7 (depends on 5)

Fluid transfer line as described in claim 5, further characterized by:
an alarm responsive to the leak detector.

### Claim 8 (depends on 1)

Fluid transfer line as described in claim 1, further characterized by:
the inner and outer chambers comprising a double containment gas line, wherein the outer chamber is used to flow the thermal control fluid around the inner chamber.

### Claim 9 (depends on 1)

Fluid transfer line as described in claim 1, further characterized by:
the thermal control fluid maintaining the working fluid at a temperature of between -15.degree. C. and 100.degree. C.

### Claim 10 (depends on 9)

Fluid transfer line as described in claim 9, further characterized by:
the thermal control fluid maintaining the working fluid at a temperature of between 30.degree. and 60.degree. C.

### Claim 11 (depends on 1)

Fluid transfer line as described in claim 1, further characterized by:
a closed loop system comprising the second chamber, the pump and temperature maintenance means, the closed loop system providing a supply of thermal control fluid at a substantially constant temperature.

### Claim 12 (depends on 1)

Fluid transfer line as described in claim 1, further characterized by:
a) said means to detect presence of the working fluid within the outer concentric chamber including a gas detector attached to the outer chamber; and
b) an alarm responsive to the means to detect the presence of the working fluid.

### Claim 13

Liquid source gas line having working fluid supply and fluid discharge connections, and providing safety containment of a working fluid which is discharged from the line in a gaseous state, characterized by:
a) said working fluid;
b) a first chamber for transferring said working fluid, wherein the working fluid is a liquid source gas;
c) a second chamber for a heating fluid;
d) working fluid supply and discharge connections communicating with the first chamber;
e) the working fluid supply and discharge connections and the first chamber configured so as to establish working fluid flow in a downstream direction;
f) the first and second chambers being configured such that, if the first chamber develops a breach in its integrity, the first chamber leaks to the second chamber or the second chamber leaks to the first chamber, depending on the relative pressures of the first and second chambers, and the second chamber contains any fluid which may leak from the first chamber;
g) the first chamber in a heat transfer relationship with the second chamber, but otherwise not communicating with the second chamber during a normal mode of operation;
h) heating fluid inlet and outlet connections on the second chamber, said inlet being located at a location on the second chamber downstream of the outlet connection, thereby permitting a heating fluid to flow in the second chamber from the inlet connection to the outlet connection in an upstream direction with respect to the working fluid;
i) a pump for causing the heating fluid to flow in said upstream direction;
j) a heater for heating the heating fluid to a temperature sufficient to maintain the heating fluid at a predetermined temperature when it reaches the heating fluid inlet connection; and
k) means to detect a breach in the integrity of the inner chamber, including means for detecting presence of the working fluid within the outer concentric chamber, whereby the detection of the working fluid within the outer concentric chamber is used as indicator of failure, wherein
a closed loop system is comprised of the second chamber, the pump and the heater, the closed loop system providing a supply of heating fluid at a substantially constant temperature.

### Claim 14 (depends on 13)

Liquid source gas line as described in claim 13, further characterized by:
a) the heating fluid comprising hot water, and the temperature maintenance means being a water heater;
b) the second chamber being used to flow the hot water around the first chamber.

### Claim 15 (depends on 13)

Liquid source gas line as described in claim 13, further characterized by:
the first and second chambers comprising a double containment gas line, wherein the second chamber used to flow the heating fluid around the first chamber.

### Claim 16 (depends on 13)

Liquid source gas line as described in claim 13, further characterized by:
the heating fluid maintaining the working fluid at a temperature of between -15.degree. C. and 100.degree. C.

### Claim 17 (depends on 13)

Liquid source gas line as described in claim 13, further characterized by:
the heating fluid maintaining the working fluid at a temperature of between 30.degree. and 60.degree. C.