Detector for force, acceleration or magnetism with respect to components in multi-dimensional directions

A force detector for detecting components in multi-dimensional directions of force in an XYZ three-dimensional coordinate system, comprising:

• eight sets of detection elements each of the elements comprising a piezoelectric element in a plate form and a first electrode formed on a first surface of said piezoelectric elements, and
• a substrate having flexibility which comprises eight second electrodes formed on a surface thereof, each of said eight sets of detection elements being arranged on each of said eight second electrodes, respectively, in such a manner that a second surface of each piezoelectric element of each detection is fixed to each second electrode,
• wherein the origin is defined at a point within said substrate, an X-axis is defined so that it passes through the original and extends in a direction parallel to the substrate surface, a Y-axis is defined so that it is perpendicular to the X-axis at the origin and extends in a direction parallel to the substrate surface, and a Z-axis is defined so that it passes through the origin and extends in a direction perpendicular to the substrate surface,
• wherein said eight sets of detection elements are such that the first detection element is arranged on the substrate in a central area corresponding to the first quadrant of the XY plane, the second detection element is arranged on the substrate in a central area corresponding to the second quadrant of the XY plane, the third detection element is arranged on the substrate in a central area corresponding to the third quadrant of the XY plane, the fourth detection element is arranged on the substrate in a central area corresponding to the fourth quadrant of the XY plane, the fifth detection element is arranged on the substrate in a peripheral area corresponding to the first quadrant of the XY plane, the sixth detection element is arranged on the substrate in a peripheral area corresponding to the second quadrant of the XY plane, the seventh detection element is arranged on the substrate in a peripheral area corresponding to the third quadrant on the XY plane, and the eight detection element is arranged on the substrate in a peripheral area corresponding to the forth quadrant of the XY plane, one electrode of said respective detection elements being fixed to the substrate,
• wherein either a peripheral portion of said substrate or a central portion in a vicinity of the origin thereof is fixed to a detector casing,
• wherein there is a working point having a function to transmit a force produced on the basis of a physical action exerted from an external point to the peripheral portion or the central portion of said substrate, and
• wherein potentials of one electrode with respect to the other electrodes fixed on the substrate are obtained in the respective detection elements.
• the detector detecting a force component in the X-axis direction produced at said working point by detecting a difference between a sum of respective potentials of said first, fourth, sixth and seventh detection elements and a sum of respective potentials of said second, third, fifth and eighth detection elements, and
• the detector detecting a force component in the Y-axis direction produced at said working point by detecting a difference between a sum of respective potentials at said first, second, seventh, and eighth detection elements and a sum of respective potentials of said third, fourth, fifth and sixth detection elements.