Plasma processing apparatus including condensation preventing means
AssigneeTokyo Electron Yamanashi Limited
InventorsKazuo Fukasawa, Masachika Suetsugu
Life of this patent
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Abstract
A plasma processing apparatus having a pair of electrodes which are installed alternately in parallel in a chamber and in which an object to be processed is placed at one electrode thereof, radiofrequency applying device for applying radiofrequency power between the pair of electrodes, cooling device for cooling the object, drying-gas introducing tube for supplying a drying gas into the chamber, and dropwise-condensation preventing member installed at a portion of the chamber so as to be in contact with the outer atmosphere. The apparatus can prevent dropwise condensation at the time of cooling and at the same time prevent the occurrence of radiofrequency leakage.
Claims25
A plasma processing apparatus, comprising:
- a pair of electrodes installed in parallel with each other in a chamber, with an object to be processed being placed on one electrode thereof;
- radiofrequency applying means for applying radiofrequency power to a space between the pair of electrodes and having a connecting portion;
- cooling means for cooling the object to be processed;
- gas introducing means for supplying a drying gas to the chamber;
- and
- condensation preventing means installed at a portion of the camber to be in contact with outer atmosphere,
- wherein said connection portion is located in the condensation preventing means and outside of the chamber.
A plasma processing apparatus, comprising:
- a pair of electrodes installed in parallel with each other in a chamber, with an object to be processed being placed on one electrode thereof;
- radiofrequency applying means for applying radiofrequency power to a space between the pair of electrodes;
- cooling means for cooling the object to be processed;
- a first gas introducing means for supplying a first drying gas to the chamber;
- condensation preventing means installed at a portion of the camber to be in contact with outer atmosphere;
- and
- a second gas introducing means for supplying a second drying gas to said condensation preventing means.
Dependencies are inferred from the claim text.