# US 5,342,067 A · Method and apparatus for machining substrate plates for magnetic memory disks > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 5,342,067 A - Document ID: US5342067A - Status: Granted - Kind: A - Application number: 08/103,709 - Filed: 1993-08-09 - Granted: 1994-08-30 - Earliest claimed: 1993-08-09 - Assignees: Corning Incorporated - Inventors: Meryle D. Adler; Harold G. Shafer, Jr. - Web page: https://patentgrep.com/patent/US5342067A ## CPC - B23Q 3/08: other than mechanically-actuated {(B23Q3/061, B23Q3/066, and B23Q3/067 take precedence)} - Y10T 279/11: Vacuum - Y10T 279/35: Miscellaneous - B23Q: DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING (tools of the kind used in lathes or boring machines B23B27/00); MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT - Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION ## Abstract This invention relates to a method and apparatus for retaining disk-like structures, such as magnetic memory substrate plates, or disks, during machining, cutting, or grinding operations. A fluid is applied to one surface of the disk to retain the other surface of the disk against a chuck at a force which is sufficient to maintain the disk against the chuck during the operations. ## Claims ### Claim 1 An apparatus for retaining, during processing, a disk-like structure having opposed major surfaces, comprising: a chuck having a surface for contacting at least a portion of one of the major surfaces of said structure; and a means for applying a flow of fluid to the other major surface of said structure, said flow of fluid sufficient to retain said structure against the contacting surface of said chuck during processing, said chuck contacting only the major surface of said disk-like structure, thereby exposing the entire peripheral edge of said structure for processing. ### Claim 2 (depends on 1) The apparatus of claim 1, wherein said means for applying a flow of fluid comprises a fluid bearing having a face, said face having at least one opening therein through which said fluid flows. ### Claim 3 (depends on 2) The apparatus of claim 2, wherein said face has a plurality of openings therein through which said fluid flows. ### Claim 4 (depends on 3) The apparatus of claim 3, said openings comprising a plurality of arcuate channels in the face of said fluid bearing, said channels in annular alignment on said face. ### Claim 5 (depends on 4) The apparatus of claim 4, further comprising a conduit connected to each channel for transporting fluid to each of the respective channels. ### Claim 6 (depends on 1) The apparatus of claim 1, wherein said surface of said chuck comprises a plurality of vacuum connected openings thereon for applying a vacuum to said one major surface. ### Claim 7 (depends on 1) The apparatus of claim 1, wherein said chuck is rotatable about an axis. ### Claim 8 (depends on 7) The apparatus of claim 7, further comprising at least one cutting tool movable in a direction perpendicular to said axis. ### Claim 9 (depends on 1) The apparatus of claim 1, wherein said fluid is water. ### Claim 10 (depends on 2) The apparatus of claim 2, wherein the face of said fluid bearing is located in a substantially parallel spaced relation to the contacting surface of said chuck. ### Claim 11 (depends on 2) The apparatus of claim 2, further comprising a support member, said fluid bearing rotatably connected to said support member. ### Claim 12 (depends on 2) The apparatus of claim 2, wherein the face of said fluid bearing has a smaller surface area than the disk-like structure to be processed. ### Claim 13 (depends on 2) The apparatus of claim 2, wherein said chuck and said fluid bearing are movable towards and away from one another. ### Claim 14 An apparatus for retaining a disk-like structure having opposed major surfaces during processing comprising: a disk support member, drivable about an axis, having a surface for contacting at least a portion of one of the major surfaces of said structure; and a fluid propelling means having a face, said face having at least one opening therein through which fluid is propelled on said structure, thereby retaining the structure against said disk support member. ### Claim 15 (depends on 14) The apparatus of claim 14, wherein said fluid propelling means is retained in rotatable relation to said support member so that said fluid propelling means adjusts itself, by propelling said fluid on said structure, and thereby enhances the uniformity of fluid flow on said structure. ### Claim 16 A method of retaining a disk-like structure during machining operations comprising: providing a chuck, driveable about an axis, having a face thereon for contacting one side of said structure; positioning said one side of said structure against said face; and applying a fluid to the other side of the structure and thereby retaining the said structure against the flat face of said chuck. ### Claim 17 (depends on 16) The method of claim 16 wherein the face of said chuck further comprises a plurality of vacuum connected openings thereon, and said method further comprises applying a vacuum to the other side of said structure. ### Claim 18 (depends on 17) The method of claim 17, wherein said vacuum is applied prior to said application of the fluid. ### Claim 19 (depends on 18) The method of claim 18, further comprising, prior to said application of said fluid, axially centering said structure on said chuck. ### Claim 20 (depends on 19) The method of claim 19, wherein said structure has an orifice therein, and said method further comprises providing a centering pin, and said centering comprises contacting the inside diameter of said orifice with said centering pin. ### Claim 21 (depends on 16) The method of claim 16, further comprising machining a portion of said structure. ### Claim 22 (depends on 20) The method of claim 20, wherein said machining comprises grinding the outside and inside diameter of said structure. ### Claim 23 An apparatus for retaining, during processing, a disk-like structure having opposed major surfaces, comprising: a chuck having a surface for contacting at least a portion of one of the major surfaces of said structure, said chuck surface comprising a plurality of vacuum connected openings thereon for applying a vacuum to one of the major surfaces of said disk-like structure; and a means for applying a flow of fluid to the other major surface of said structure, said flow of fluid sufficient to retain said structure against the contacting surface of said chuck during processing. ### Claim 24 An apparatus for retaining, during processing, a disk-like structure having opposed major surfaces, comprising: a chuck having a surface for contacting at least a portion of one of the major surfaces of said structure, said chuck rotatable about an axis; and a means for applying a flow of fluid to the other major surface of said structure, said flow of fluid sufficient to retain said structure against the contacting surface of said chuck during processing.