Method for producing ceramic-based electronic components
AssigneeAerospace Coating Systems, Inc.
InventorsRussell S. Giller, James D. Horrigan
Life of this patent
Estimating the term…
Abstract
A method of heat treating ceramic-based electronic components by providing a furnace fixture adapted to support the ceramic-based electronic components which is made from a substrate selected from the group consisting of silicon carbide (SiC), cordierite (2MgO.2Al2O.sub.3.5SiO.sub.2), mullite (3Al.sub.2 O.sub.3.2SiO.sub.2), stabilized zirconia, and alumina (Al.sub.2 O.sub.3) containing a glassy bond phase. A cladding layer of zirconia is then deposited on the furnace fixture substrate by plasma deposition. The ceramic-based electronic component to be fired is placed on the zirconia-coated substrate; and heated to a desired temperature to heat treat the component.
Claims19
A method of heat treating ceramic-based electonic components comprising barium titanate, said method comprising the steps of:
- a) providing a furnace fixture adapted to support ceramic-based electronic components comprising a substrate selected from the group consisting of silicon carbide (SiC), cordierite (2MgO.2Al2O.sub.3.5SiO.sub.2), mullite (3Al.sub.2 O.sub.3.2SiO.sub.2), stabilized zirconia, and alumina containing a glassy bond phase;
- b) depositing a cladding layer of zirconia on said furnace fixture substrate by plasma deposition;
- c) providing a ceramic-based electronic component comprising barium titanate;
- d) placing said ceramic-based electronic component on said zirconia-coated substrate;
- and
- e) firing said ceramic-based electronic component and zirconia-clad substrate to a desired temperature of at least about 1000.degree. C. to heat treat said ceramic-based electronic component.
A method of heat treating ceramic-based electronic components comprising barium titanate, said method comprising the steps of:
- a) providing a furnace fixture adapted to support ceramic-based electonic components comprising a substrate selected from the group consisting of silicon carbide (SiC), cordierite (2MgO.2Al2O.sub.3.5SiO.sub.2), mullite (3Al.sub.2 O.sub.3.2SiO.sub.2), stabilized zirconia, and alumina containing a glassy bond phase, said substrate having deposited on at least a portion of a surface thereof a smooth, impermeable top cladding layer of plasma-deposited zirconia having a thickness of less than 0.010 in.;
- b) providing a ceramic-based electronic component comprising barium titanate;
- c) placing said ceramic-based electronic component on the zirconia-coated portion of said substrate;
- and
- d) firing sad ceramic-based electronic component and zirconia-clad fixture to a desired temperature of at least about 1000.degree. C. to heat treat said ceramic-based electronic component.
A method of heat treating ceramic-based electronic components comprising barium titanate, said method comprising the steps of:
- a) providing a furnace fixture adapted to support a ceramic-based electronic component comprising a substrate selected from the group consisting of silicon carbide (SiC), cordierite (2MgO.2Al2O.sub.3.5SiO.sub.2), mullite (2Al.sub.2 O.sub.3.2SiO.sub.2), stabilized zirconia, and alumina containing a glassy bond phase, said substrate having deposited at least a portion of a surface thereof a cladding layer comprising plasma-deposited zirconia;
- b) providing a ceramic-based electonic component comprising barium titanate;
- c) placing said ceramic-based electronic component on the zirconia-coated portion of said substrate;
- and
- d) firing said ceramic-based electronic component and zirconia-clad fixture to a desired temperature of at least about 1000.degree. C. to heat treat said ceramic-based electronic component.
Dependencies are inferred from the claim text.