Vibrating beam accelerometer
AssigneeAlliedSignal Inc.
InventorsWilliam C. Albert, Herbert T. Califano
Life of this patent
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Abstract
A vibrating beam accelerometer contains an inner structure having a vibrating beam extending between a pair of isolator masses which are connected via isolator beams to a pair of structures, an outer structure having flexure beams extending between a mount structure and a proof mass structure and a peripheral seal structure surrounding said inner structure and said outer structure. Seal plates containing a ring of glass frit material sandwich the above assembly. An electrode pattern termination extends from the above assembly, through the ring of glass frit material, to electronic circuitry containing an oscillator.
Claims13
A vibrating beam accelerometer comprising:
- an inner structure comprising a vibrating beam extending between a pair of isolator masses which are each connected via isolator beams to a pair of structures;
- an outer structure comprising flexure beams extending between a mount structure and a proof mass structure;
- a peripheral seal structure mounted to said mount structure and surrounding said inner structure and said outer structure;
- an electrode pattern termination extending to and around an edge of said mount structure of said outer structure;
- and
- electronic circuitry means including an oscillator connected to said electrode pattern termination.
An accelerometer comprising:
- a plurality of separate sensor structures wherein each of said plurality of separate sensor structures comprises:
- an inner structure comprising a vibrating beam extending between a pair of isolator masses which are each connected via isolator beams to a pair of structures;
- an outer structure comprising flexure beams extending between a mount structure and a proof mass structure;
- a peripheral seal structure mounted to said mount structure and surrounding said inner structure and said outer structure;
- an electrode pattern termination extending to and around an edge of said mount structure;
- and
- electronic circuitry means including an oscillator connected to said electrode pattern termination.
Dependencies are inferred from the claim text.