US 5,334,846 A · Correction of charged particle beam exposure deflection by detecting stage position and a position detection mark

Abstract

A charged particle beam exposure apparatus is provided with a source for irradiating a charged particle beam on an object which has a position detection mark provided thereon and is carried on a movable stage, a deflection part for deflecting the charged particle beam based on deflection signals, a first detection part for detecting the position detection mark of the object, a second detection part for detecting a stage position of the object and for outputting a position detection signal, a moving part for moving the stage which carries the object, and a control unit for controlling inputs and outputs of the source, the deflection part, the first and second detection parts and the moving part. The control unit corrects the deflection signals which are supplied to the deflection part so that the position detection mark is irradiated by the charged particle beam based on the position detection signal which is output from the second detection part and is related to the stage position of the object which is continuously moved by the moving part.

Claims14

Dependent claims

A charged particle beam exposure apparatus comprising:

a source for irradiating a charged particle beam on a continuously moving object which has a position detection mark provided thereon and is carried on a movable stage;
deflection means for deflecting the charged particle beam based on deflection signals;
first detection means for detecting the position detection mark of the object;
second detection means for detecting a stage position of the continuously moving object and for outputting a position detection signal;
moving means for moving the stage which carries the object;
and
control means for controlling inputs and outputs of said source, said deflection means, said first and second detection means and said moving means,
said control means including means for correcting the deflection signals which are supplied to said deflection means so that the position detection mark is irradiated by the charged particle beam based on the position detection signal which is output from said second detection means and is related to the stage position of the object which is continuously moved by said moving means.

5 more elements

A method of controlling a charged particle beam exposure apparatus which irradiates a charged particle beam on an object which has a position detection mark provided thereon and is carried on a movable stage, said method comprising the steps of:

(a) continuously moving the stage so as to move the object;
(b) deflecting the charged particle beam onto the position detection mark of the object;
(c) detecting a stage position of the object and correcting the deflection of the charged particle beam depending on the detected stage position;
and
(d) detecting the position detection mark of the object by the charged particle beam the deflection of which is corrected by said step (c).

2 more elements

Dependencies are inferred from the claim text.

Correction of charged particle beam exposure deflection by detecting stage position and a position detection mark

Life of this patent

Correction of charged particle beam exposure deflection by detecting stage position and a position detection mark

Life of this patent

Abstract

Claims14