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US 5,334,461 AGranted
Product formed by method of controlling resistivity of plated metal
AssigneeInternational Business Machines Corporation
InventorsMelanie A. Day, Ronald A. Kaschak, Steven A. Schubert
Life of this patent
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Abstract
Method and product resulting therefrom of controlling the residual resistivity of an electrolessly deposited metal by first, calculating the mathematical relationship between the residual resistivity of the deposited metal and its rate of deposition and second, depositing said metal at a rate to produce a predetermined residual resistivity.
Claims4
A metal formed in accordance with a method comprising the steps of:
- determining the variable relationship between the magnitude of a residual resistivity of a metal when autocatalytically plated onto a substrate and the rate of plating said metal;
- and
- autocatalytically plating said metal at least three distinct, selected rates of deposition to produce a desired, non-uniform residual resistivity profile over the cross section of the metal, which profile includes at least three distinct, corresponding residual resistivities.
A metal formed in accordance with a method comprising the steps of:
- determining the variable relationship between a purity of a metal when electrolessly plated onto a substrate and the rate of plating said metal;
- and
- electrolessly plating said metal at least three distinct, selected rates of deposition to produce a desired, non-uniform purity over the cross section of the plated metal, which profile includes at least three distinct, corresponding levels of purity.
Dependencies are inferred from the claim text.