Radiation-sensitive composition

A radiation-sensitive composition comprising (A) a polymer having a recurring unit represented by formula (1):

• ##STR22## wherein R.sup.1 represents a germyl group selected from the group consisting of a trimethylgermyl group, a triethylgermyl group, a tert-butyldimethylgermyl group, an isopropyldimethylgermyl group and a phenyldimethylgermyl group, and R.sup.2 represents --OR.sup.3 or --NR.sup.4 R.sup.5 in which R.sup.3 is a germyl group selected from the group consisting of a trimethylgermyl group, a triethylgermyl group, a tert-butyldimethylgermyl group, an isopropyldimethylgermyl group and a phenyldimethylgermyl group, and R.sup.4 and R.sup.5, which may be the same or different, are hydrogen atoms, straight-chain alkyl groups, cyclic alkyl groups, aralkyl groups or aryl groups, and (B) a radiation-sensitive acid-forming agent.

A radiation-sensitive composition comprising (A) a polymer consisting only of a recurring unit represented by formula (1):

• ##STR23## wherein R.sup.1 represents a substituted methyl group, a substituted ethyl group, a silyl group, a germyl group or an alkoxycarbonyl group, and R.sup.2 represents --OR.sup.3 or --NR.sup.4 R.sup.5 in which R.sup.3 is a hydrogen atom, a straight-chain alkyl group, a cyclic alkyl group, an aryl group, an aralkyl group, a substituted methyl group, a substituted ethyl group, a silyl group or an alkoxycarbonyl group, and R.sup.4 and R.sup.5, which may be the same or different, are hydrogen atoms, straight-chain alkyl groups, cyclic alkyl groups, aralkyl groups or aryl groups, and (B) a radiation-sensitive acid-forming agent.