Field emission type emitter and a method of manufacturing thereof
AssigneeSony Corporation
InventorsHidetoshi Watanabe, Hiroshi Komatsu, Toshiaki Hasegawa, Toshiyuki Ishimaru
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AssigneeSony Corporation
InventorsHidetoshi Watanabe, Hiroshi Komatsu, Toshiaki Hasegawa, Toshiyuki Ishimaru
Estimating the term…
A field emission type emitter comprises: a conductive substrate; an insulating film formed on the conductive substrate; a cavity formed in the insulating film; a cathode formed on the conductive substrate in the cavity; and a gate electrode formed over the insulating film. The gate electrode is preferably made of refractory metal silicide. A polycrystalline silicon film is preferably formed between the gate electrode and the insulating film. The side walls of the insulating film in the portion of the cavity preferably have an inverse tapered shape. In the case where a glass substrate is used, a conductive film is formed on the glass substrate through an insulating film and the cathode is formed on the conductive film in the cavity. Manufacturing methods of the field emission type emitter are also disclosed.
A field emission type emitter comprising:
A field emission type emitter comprising:
A field emission type emitter comprising:
Dependencies are inferred from the claim text.