Method for manufacturing inorganic membranes by organometallic chemical vapor infiltration

A method for manufacturing an inorganic membrane capable of separating oxygen from an oxygen-containing gaseous mixture, the method comprising the steps of:

• (a) depositing a porous multicomponent metallic oxide layer represented by the formula A.sub.x A'.sub.x' A".sub.x" B.sub.y B'.sub.y' B".sub.y" O.sub.3-z, where A,A',A" are chosen from the group comprising Groups 1, 2, 3 and 15 and the F block lanthanides;
• and B,B',B" are chosen from the D block transition metals according to the Periodic Table of the Elements adopted by the IUPAC wherein 0<x.ltoreq.1 , 0.ltoreq.x'.ltoreq.1, 0.ltoreq.x".ltoreq.1, 0<y.ltoreq.1, 0.ltoreq.y'.ltoreq.1, 0.ltoreq.y".ltoreq.1, X+x'+x"=1, y+Y'+y"=1 and z is a number which renders the compound charge neutral, onto a porous support to form a porous composite having a network of pores capable of transporting gases;
• (b) contacting a first surface of the porous composite with a vaporized organometallic complex and a second surface of the porous composite with a gaseous reactive agent comprising an oxidizing or reducing agent at a temperature ranging from 300.degree. to 600.degree. C. and a pressure sufficient to react the organometallic complex and the gaseous reactive agent to form plugs in the pores of the porous composite to form an inorganic membrane having essentially no through porosity.