US 5,332,443 A · Lift fingers for substrate processing apparatus

Abstract

A substrate lifting apparatus for use in a substrate processing apparatus which includes a thermal reactor having a substrate processing chamber and a substrate support located in the chamber. The lifting apparatus consists of a generally circular shaped support with four seats formed therein; four substrate lifting elements, each having a substrate engaging end and a securing tab sized to be received in a seat; a fastener, associated with each lifting element, which secures the tab into the seat; and an adjuster, associated with each lifting element, located between the tab and the seat. When the tab is secured in the seat and the adjuster is operated, the lifting element is caused to move in a plane parallel to a plane formed through the center of the fastener and the adjuster.

Claims20

Dependent claims

A substrate processing apparatus comprising:

a thermal reactor including a substrate processing chamber;
and
lifting apparatus for lifting a substrate within the chamber including
(i) at least one substrate lifting element having a substrate engaging end and a securing tab;
(ii) a lifting element support having a seat formed therein, wherein the seat is sized to receive the tab of the lifting element;
(iii) a fastener for securing the tab into the seat;
and
(iv) an adjuster located between the tab and the seat and operable to adjust the position of the substrate engaging end,
whereby, when the tab is secured in the seat and the adjuster is operated, the lifting element is caused to move in a plane parallel to a plane formed through the center of the fastener and the adjuster.

6 more elements

Dependencies are inferred from the claim text.

Lift fingers for substrate processing apparatus

Life of this patent

Lift fingers for substrate processing apparatus

Life of this patent

Abstract

Claims20