Robot prealigner
AssigneeADE Corporation
InventorsNoel S. Poduje, Roy S. Mallory
Life of this patent
Estimating the term…
Abstract
An alignment station for elements such as semiconductor wafers on a robot arm uses a rotating support and edge detector which in combination are operative to place a wafer on the rotating support, detect wafer alignment, move the wafer to bring it into alignment either on the rotating support itself or onto a separate station.
Claims22
A system for combined element transport and alignment comprising:
- means for dimensionally characterizing a misalignment of an element on a pedestal, said misalignment including the position of the element centroid relative to the center of rotation of said pedestal;
- means for positioning the element on the pedestal so that said misalignment occurs along a predetermined straight line direction;
- a linear manipulator having an element holder on an articulated two leg arm, having means for angling the legs of the arm to produce a first direction of motion for said holder along a straight line, having means for providing both a second direction of motion about an axis and a third direction of motion in elevation, and having means for maintaining the angular position of the holder relative to said straight line during motion of the holder in the first direction;
- and
- means for controlling the means for positioning to align the first direction of motion along said predetermined straight line direction when said element misalignment is therealong and means for moving said element on said holder in the straight line direction as a function of the misalignment thereof.
A method for combined element transport and alignment comprising the steps of:
- dimensionally characterizing a misalignment of an element on a pedestal, said misalignment including the position of the element centroid relative to the center of rotation of the pedestal;
- positioning the element on the pedestal so that misalignment occurs along a predetermined straight line direction;
- producing, with a linear manipulator having an element holder on an articulated two leg arm and means for angling the legs of the arm, a first direction of motion for said holder along a straight line, a second direction of motion about an axis and a third direction of motion in elevation;
- maintaining the angular position of the holder relative to said straight line during motion of the holder in the first direction;
- and
- aligning the first direction of motion along said predetermined straight line direction when said element misalignment is therealong and moving said element on said holder in the straight line direction as a function of the misalignment thereof.
A system for combined element transport to and from a station and alignment comprising:
- means for dimensionally characterizing a misalignment of an element on a pedestal, said misalignment including the position of the element centroid relative to the center of rotation of said pedestal;
- means for positioning the element on the pedestal so that misalignment occurs along a predetermined straight line direction;
- a linear manipulator having an element holder on an articulated two leg arm, means for angling the legs of the arm to produce a first direction of motion for said holder along a straight line, and having means for maintaining the angular position of the holder relative to said straight line during motion of the holder in the first direction;
- means coupled to the linear manipulator and cooperative with the station and the pedestal for providing a controlled relative motion of said holder and station and said holder and pedestal in a second direction of motion about an axis and a third direction of motion in elevation;
- and
- means for controlling the means for positioning to align the first direction of motion along said predetermined straight line direction when said element misalignment is therealong and means cooperative with the linear manipulator for moving said element on said holder in the straight line direction as a function of the misalignment thereof.
A system for combined element transport and alignment comprising:
- means for dimensionally characterizing a misalignment of an element on a pedestal, said misalignment including the position of the element centroid relative to the center of rotation of said pedestal;
- means for positioning the element on the pedestal so that misalignment occurs along a predetermined straight line direction;
- a linear manipulator having an element holder on an articulated two leg arm means for angling the legs of the arm to produce a first direction of motion for said holder along a straight line, a second direction about an axis and a third direction of motion in elevation;
- and
- means for controlling the means for positioning to align the first direction of motion along said predetermined straight line direction when said element misalignment is therealong and means for moving said element on said holder in the straight line direction as a function of the misalignment thereof;
- said means for moving being operative to lift the element from the pedestal in a misaligned position and to replace the element on the pedestal in an aligned position.
Apparatus for aligning an element comprising:
- a robot arm comprising a base and an arm coupled to the base for supporting said element, said arm being moveable radially, along an axis passing through the center of said base, rotationally with respect to said axis, and elevationally, wherein said radial, rotational, and elevational movements are independent of one another;
- a rotatable pedestal for receiving said element from said arm, wherein said axis further passes through the center of said pedestal;
- an edge sensor disposed adjacent to said rotatable pedestal for sensing the position on an edge of said element relative to a predetermined location of said pedestal, wherein said sensed edge position corresponds to an offset characterized by an angle of offset and a magnitude of offset between the centroid of said element and said center of rotation of said pedestal;
- and
- electronics, responsive to said sensed edge position, for providing a rotation control signal representing said sensed angle of offset, wherein said rotatable pedestal is responsive to said rotation control signal to rotate said pedestal so that said offset is aligned with said axis, wherein said element is supported by said arm and moved radially along said axis to reduce said sensed magnitude of offset.
A method for aligning an element comprising the steps of:
- placing said element on a rotatable pedestal, said element having an edge and a centroid associated therewith;
- sensing the position of said edge relative to a center of rotation of said pedestal, wherein said sensed edge position corresponds to an offset characterized by an angle of offset and a magnitude of offset between the centroid of said element and said center of rotation of said pedestal;
- rotating said element on said pedestal in response to said sensed angle of offset so that said offset is aligned with a predetermined axis;
- and
- supporting said element with a robot arm, said robot arm being moveable radially along said predetermined axis, rotationally with respect to said axis, and elevationally, wherein said radial, rotational, and elevational movements are independent, to move said element radially along said predetermined axis to reduce said sensed magnitude of offset.
Dependencies are inferred from the claim text.