Unmanned conveying device in clean room

An apparatus for a clean room, comprising:

• an unmanned conveying device provided with a container for accommodating an object to be conveyed thereon, the container being connected to an inert gas source through a gas supply passage so that the atmosphere in the container can be replaced by a nitrogen gas, wherein the unmanned conveying device has a coupler device with a first coupler unit which is connected to the gas supply passage and the wherein the inert gas source is located on the ground and connected to a second coupler unit of a coupler device on the ground through a pipe, the gas supply passage being connected to the inert gas source when the coupler units are coupled to each other, wherein the unmanned conveying device has a battery mounted thereon which can be charged by an automatic charging station on the ground, the second coupler unit of the coupler device on the ground being installed in the automatic charging station, and the second and first coupler units of the coupler devices on the ground and the unmanned conveying device having respective charging connectors which are respectively coupled to the automatic charging station and the battery and having respective gas passage couplings which are respectively coupled to the inert gas source and the gas supply passage, including a closing valve which controls flow of the inert gas through the pipe, and wherein the second and first coupler units of the coupler devices on the ground and the unmanned conveying device are provided with coupling verification means which is responsive to a distance between the coupler devices being less than a distance therebetween when the charging connectors and the gas passage couplings thereon first engage each other for issuing an output for controlling the closing valve to facilitate a flow of the inert gas through the pipe.