Method of fabricating magnetic thin film structures with edge closure layers

A method of fabricating a magnetic thin film structure comprising the steps of:

• depositing a first layer of magnetic material on a substrate;
• forming a frame on said first layer of magnetic material;
• forming a laminate of alternate layers of magnetic material and nonmagnetic material, said laminate including at least one layer of nonmagnetic material and at least two layers of magnetic material, one layer of said at least two layers of magnetic material being an upper layer of said laminate;
• removing said frame;
• and
• depositing a top layer of magnetic material on said upper layer and at least a first edge closure layer of magnetic material on a first side edge of said laminate, said first edge closure layer being in magnetic contact with each of said at least two layers of magnetic material and said top layer of magnetic material.

A method of fabricating a magnetic thin film structure comprising the steps of:

• forming a seed layer of magnetic material on a substrate;
• electroplating a laminate of alternate layers of magnetic material and nonmagnetic material on said seed layer, said laminate including at least one layer of nonmagnetic material and at least two layers of magnetic material, one layer of said at least two layers of magnetic material being a top layer of said laminate;
• electroplating a first edge closure layer of magnetic material on a first side edge of said laminate, said first edge closure layer being in magnetic contact with each of said at least two layers of magnetic material and;
• removing said seed layer from said substrate.

A method of fabricating a magnetic thin film structure comprising the steps of:

• depositing a first layer of magnetic material on a substrate;
• depositing a first masking layer having a window on said first layer of magnetic material;
• depositing a layer of nonmagnetic material on said first layer through said window;
• widening the window of said first masking layer;
• depositing a second layer of magnetic material on said layer of nonmagnetic material through said widened window, said second layer extending over opposed side edges of said layer of nonmagnetic material and magnetically contacting said first layer of magnetic material;
• depositing a second masking layer on said second layer of magnetic material;
• and
• removing said first masking layer, said first layer of magnetic material surrounding said second masking layer and said second masking layer.

A method of fabricating a magnetic thin film structure comprising the steps of:

• depositing a first layer of magnetic material on a substrate;
• depositing a first masking layer having a window of a first width on said first layer of magnetic material;
• depositing a layer of nonmagnetic material on said first layer through said window;
• removing the first masking layer and depositing a second masking layer having a window of a second width greater than said first width on said first layer;
• depositing a second layer of magnetic material on said layer of nonmagnetic material through the window in said second masking layer, said second magnetic layer extending over opposed side edges of said layer of nonmagnetic material and magnetically contacting said first layer of magnetic material;
• depositing a third masking layer on said second layer of magnetic material;
• and
• removing said second masking layer, removing said first layer of magnetic material surrounding said second masking layer and removing said second masking layer.

A method of fabricating a magnetic thin film structure comprising the steps of:

• depositing a first layer of magnetic material on a substrate;
• depositing a first masking layer having a window on said first layer of magnetic material;
• depositing a layer of nonmagnetic material on said first layer through said window;
• depositing a second layer of magnetic material on said layer of nonmagnetic material through said window, said second magnetic layer extending over one side edge of said layer of nonmagnetic material and magnetically contacting said first layer of magnetic material;
• depositing a second masking layer on said second layer of magnetic material;
• and
• removing said first masking layer, removing said first layer of magnetic material surrounding said second masking layer and removing said second masking layer.