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US 5,331,456 AGranted
Radiation microscope
AssigneeOlympus Optical Co., Ltd.
InventorYoshiaki Horikawa
Life of this patent
Estimating the term…
Abstract
An X-ray microscope is equipped with an X-ray source generating radiation including X rays ranging in wavelength from 400 to 600 .ANG., a beam splitter composed of a thin film which reflects a part of the X rays from the X-ray source and transmits the remainder, an objective, and an X-ray detector. Thus, the X-ray microscope allows the reflected radiation from an sample to be observed in a soft X-ray region, and enables high resolution microscopy even in a thick sample.
Claims3
A microscope comprising:
- a radiation source for emitting radiation ranging in wavelength at least from 400 to 600 .ANG.;
- a beam splitter;
- an objective;
- and
- a detector for detecting said radiation;
- wherein said beam splitter is composed of a film which reflects a part of said radiation emitted from said radiation source and transmits a remaining part of said radiation.
3 more elements
A microscope of reflection type, comprising:
- a radiation source for emitting radiation ranging in wavelength at least from 400 to 600 .ANG.;
- a beam splitter composed of a film reflecting a part of radiation emitted from said radiation source;
- an objective for converging said radiation reflected from said beam splitter on an object and focusing said radiation reflected from said object through said beam splitter at a predetermined position;
- and
- a detector for receiving said radiation focused by said objective.
2 more elements
Dependencies are inferred from the claim text.