Method for producing liquid-discharging recording head, liquid-discharging recording head produced by said method, and recording apparatus utilizing said recording head

A method for producing a liquid discharging recording head including an ink discharge opening, an ink channel communicating with said ink discharge opening, and an energy generating element provided corresponding to said ink channel and adapted for generating energy to be utilized for ink discharge, comprising steps of:

• forming a first photosensitive material layer for ink channel formation, on a substrate bearing thereon said energy generating element and provided therein with an ink supply opening;
• pattern exposing said first photosensitive material layer for forming the ink channel;
• forming a second photosensitive material layer on said first photosensitive material layer in which a latent image of the ink channel is patterned;
• pattern exposing said second photosensitive material layer for forming the ink discharge opening;
• and
• developing said first photosensitive material layer and said second photosensitive material layer.

A method for producing a liquid discharging recording head including an ink discharge opening, an ink supply opening, an ink channel communicating with said ink discharge opening and said ink supply opening, and an energy generating element provided corresponding to said ink channel and adapted for generating energy to be utilized for ink discharge, comprising the steps of:

• A) forming a first photosensitive material layer for ink channel formation, composed of a thermally crosslinkable positive resist on a substrate bearing thereon said energy generating element, thermally crosslinking said resist, and pattern exposing said crosslinked first photosensitive material layer by an ionizing radiation for forming the ink channel;
• B) forming a second photosensitive material layer composed of thermally crosslinkable positive resist on said exposed first photosensitive material layer, thermally crosslinking said second photosensitive material layer, and pattern exposing said crosslinked second photosensitive material layer by an ionizing radiation for forming the ink discharge opening and the ink supply opening;
• and
• C) developing the latent images formed by the pattern exposures in said first photosensitive material layer and said second photosensitive material layer;
• wherein said steps A, B and C are conducted in successive order.

A method for producing a liquid-discharging recording head including an ink discharge opening, an ink channel communicating with said ink discharge opening, and an energy generating element provided corresponding to said ink channel and adapted for generating energy to be utilized for ink discharge, comprising the steps of:

• A) forming a first photosensitive material layer for ink channel formation, composed of a thermally crosslinkable positive resists on a substrate bearing thereon said energy generating element, and provided therein with an ink supply opening thermally crosslinking said resist, and pattern exposing said crosslinked first photosensitive material layer by an ionizing radiation for forming the ink channel;
• B) forming a second photosensitive material layer composed of thermally crosslinkable positive resists on said exposed first photosensitive material layer, thermally crosslinking said second photosensitive material layer, and pattern exposing said crosslinked second photosensitive material layer by an ionizing radiation for forming said ink discharging opening;
• and
• C) developing the latent images formed by the pattern exposures in said first photosensitive material layer and said second photosensitive material layer;
• wherein said steps A, B and C are conducted in successive order.

A method for producing a liquid-discharging recording head including an ink discharge opening, an ink supply opening, an ink channel communicating with said ink discharge opening and said ink supply opening, and an energy generating element provided corresponding to said ink channel and adapted for generating energy to be utilized for ink discharge, comprising the steps of:

• A) forming a first photosensitive material layer for ink channel formation, composed of a thermally crosslinkable positive resist on a substrate bearing thereon said energy generating element, thermally crosslinking said resist, and pattern exposing said crosslinked first photosensitive material layer by an ionizing radiation for forming the ink channel;
• B) forming a second photosensitive material layer composed of thermally crosslinkable positive resist on said exposed first photosensitive material layer, thermally crosslinking said second photosensitive material layer at a crosslinking temperature not exceeding that of the first photosensitive material layer, and pattern exposing said crosslinked second photosensitive material layer by an ionizing radiation for forming the ink discharge opening and the ink supply opening;
• and
• C) developing the latent image formed by the pattern exposure in said first photosensitive material layer and said second photosensitive material layer;
• wherein said steps A, B and C are conducted in successive order.

A method for producing a liquid-discharging recording head including an ink discharge opening, an ink channel communicating with said ink discharge opening, and an energy generating element provided corresponding to said ink channel and adapted for generating energy to be utilized for ink discharge, comprising the steps of:

• A) a forming a first photosensitive material layer for ink channel formation, composed of a thermally crosslinkable positive resist on a substrate bearing thereon said energy generating element, and provided therein with an ink supply opening, thermally crosslinking said resist, and pattern exposing said crosslinked first photosensitive material layer by an ionizing radiation for forming the ink channel;
• B) forming a second photosensitive material layer composed of thermally crosslinkable positive resist on said exposed first photosensitive material layer, thermally crosslinking said second photosensitive material layer at a crosslinking temperature not exceeding that of the first photosensitive material layer, and pattern exposing said crosslinked second photosensitive material layer by an ionizing radiation for forming the ink discharge opening and the ink supply opening;
• and
• C) developing the latent images formed by the pattern exposures in said first photosensitive material layer and said second photosensitive material layer;
• wherein said steps A, B and C are conducted in successive order.

A method for producing a liquid-discharging recording head, comprising:

• a first step of forming a first positive crosslinkable photosensitive material layer containing an epoxy group on a substrate bearing thereon an element for generate energy for ink discharge, thermally crosslinking said first positive photosensitive material layer, and exposing said thermally crosslinked first positive photosensitive material layer to light, thereby forming a latent image of a liquid channel;
• a second step of forming a second positive crosslinkable photosensitive material layer containing an epoxy group on the first positive photosensitive material layer having the latent image therein, thermally crosslinking said second positive photosensitive material layer, and exposing said crosslinked second positive photosensitive material layer to light thereby forming a latent image of a liquid discharge opening;
• and
• a third step of developing said first positive photosensitive material layer and said second positive photosensitive material layer having the latent images therein, thereby forming the liquid channel and the liquid discharge opening.

A method for producing a liquid-discharging recording head including an ink discharge opening, an ink supply opening, an ink channel communicating with said ink discharge opening and said ink supply opening, and an energy generating element provided corresponding to said ink channel and adapted for generating energy to be utilized for ink discharge, comprising the steps of:

• forming a first photosensitive material layer for ink channel formation, composed of a thermally crosslinkable positive resist sensitive to an ionizing radiation, on a substrate bearing thereon said energy generating element;
• insolubilizing said first photosensitive material layer by crosslinking;
• pattern exposing said insolubilized first photosensitive material layer by an ionizing radiation for forming the ink channel;
• forming a second photosensitive material layer, sensitive to light of a main emission wavelength of 300 nm or longer, on said first photosensitive material layer;
• pattern exposing said second photosensitive material layer by a light with a main emission wavelength of 300 nm or longer for forming the ink discharge opening and the ink supply opening;
• and
• developing said first photosensitive material layer and said second photosensitive material layer.

A method for producing a liquid-discharging recording head including an ink discharge opening, an ink channel communicating with said ink discharge opening, and an energy generating element provided corresponding to said ink channel and adapted for generating energy to be utilized for ink discharge, comprising the steps of:

• forming a first photosensitive material layer for ink channel formation, composed of a thermally crosslinkable positive resist sensitive to an ionizing radiation, on a substrate bearing thereon said energy generating element and provided therein with an ink supply opening;
• insolubilizing said first photosensitive material layer by crosslinking;
• pattern exposing said insolubilized first photosensitive material layer by an ionizing radiation for forming the ink channel;
• forming a second photosensitive material layer sensitive to light of a main emission wavelength of 300 nm or longer on said first photosensitive material layer;
• pattern exposing said second photosensitive material layer by a light with a main emission wavelength of 300 nm or longer for forming the ink discharge opening;
• and
• developing said first photosensitive material layer and said second photosensitive material layer.

A method for producing a liquid-discharging recording head including an ink discharge opening, an ink supply opening, an ink channel communicating with said ink discharge opening and said ink supply opening, and an energy generating element provided corresponding to said ink channel and adapted for generating energy to be utilized for ink discharge, comprising the steps of:

• forming a first negative photosensitive material layer for ink channel formation, having a predetermined photosensitive spectral region, on a substrate bearing thereon said energy generating element;
• pattern exposing said first photosensitive material layer within said predetermined photosensitive spectral region for forming the ink channel;
• forming, on said first photosensitive material layer, a second negative photosensitive material layer, with a photosensitive spectral region different from that of said first photosensitive material layer;
• pattern exposing said second negative photosensitive material layer within said different photosensitive spectral region for forming the ink discharge opening and the ink supply opening;
• and
• developing said first photosensitive material layer and said second photosensitive material layer.

A method for producing a liquid-discharging recording head including an ink discharge opening, an ink supply opening, an ink channel communicating with said ink discharge opening and said ink supply opening, and an energy generating element provided corresponding to said ink channel and adapted for generating energy to be utilized for ink discharge, comprising the steps of:

• forming a first negative photosensitive material layer for ink channel formation, on a substrate bearing thereon said energy generating element;
• pattern exposing said first photosensitive material layer forming the ink channel;
• forming, on said first photosensitive material layer, a second negative photosensitive material layer of a gelation sensitivity different from that of said first photosensitive material layer;
• pattern exposing said second negative photosensitive material layer for forming the ink discharge opening and the ink supply opening;
• and
• developing said first photosensitive material layer and said second photosensitive material layer.

A method for producing a liquid-discharging recording head including an ink discharge opening, an ink supply opening, an ink channel communicating with said ink discharge opening and said ink supply opening, and an energy generating element provided corresponding to said ink channel and adapted for generating energy to be utilized for ink discharge, comprising the steps of:

• forming a first negative photosensitive material layer for ink channel formation, on a substrate bearing thereon said energy generating element;
• pattern exposing said first photosensitive material layer forming the ink channel;
• forming, on said first photosensitive material layer, a second negative photosensitive material layer of an average molecular weight larger than that of said first photosensitive material layer;
• pattern exposing said second photosensitive material layer for forming the ink discharge opening and the ink supply opening;
• and
• developing said first photosensitive layer and said second photosensitive material layer.

A method for producing a liquid-discharging recording head including an ink discharge opening, an ink supply opening, an ink channel communicating with said ink discharge opening and said ink supply opening, and an energy generating element provided corresponding to said ink channel and adapted for generating energy to be utilized for ink discharge, comprising the steps of:

• forming a first negative photosensitive material layer for ink channel formation, on a substrate bearing thereon said energy generating element;
• pattern exposing said first photosensitive material layer for forming the ink channel;
• forming, on said first photosensitive material layer, a second negative photosensitive material layer containing a larger amount of photopolymerization initiator than in said first photosensitive material layer;
• pattern exposing said second photosensitive material layer for forming the ink discharge opening and the ink supply opening;
• and
• developing said first photosensitive material layer and said second photosensitive material layer.

A method for producing a liquid-discharging recording head including an ink discharge opening, an ink channel communicating with said ink discharge opening and an ink supply opening, and an energy generating element provided corresponding to said ink channel and adapted for generating energy to be utilized for ink discharge, comprising the steps of:

• forming a first negative photosensitive material layer for ink channel formation, having a predetermined photosensitive spectral region, on a substrate bearing thereon said energy generating element and provided therein with said ink supply opening;
• pattern exposing said first photosensitive material layer within said predetermined photosensitive spectral region, for forming the ink channel;
• forming, on said first photosensitive material layer, a second negative photosensitive material layer, with a photosensitive spectral region different from that of said first photosensitive material layer;
• pattern exposing said second negative photosensitive material layer within said different photosensitive spectral region for forming the ink discharge opening;
• and
• developing said first photosensitive material layer and said second photosensitive material layer.

A method for producing a liquid-discharging recording head including an ink discharge opening, an ink channel communicating with said ink discharge opening, and an energy generating element provided corresponding to said ink channel and adapted for generating energy to be utilized for ink discharge, comprising the steps of:

• forming a first negative photosensitive material layer for ink channel formation on a substrate bearing thereon said energy generating element and provided therein with an ink supply opening;
• pattern exposing said first photosensitive material layer for forming the ink channel;
• forming, on said first photosensitive material layer, a second negative photosensitive material layer of a gelation sensitivity to an exposing light different from that of said first photosensitive material layer;
• pattern exposing said second photosensitive material layer for forming the ink discharge opening;
• and
• developing said first photosensitive material layer and said second photosensitive material layer.

A method for producing a liquid-discharging recording head including an ink discharge opening, an ink channel communicating with said ink discharge opening, and an energy generating element provided corresponding to said ink channel and adapted for generating energy to be utilized for ink discharge, comprising the steps of:

• forming a first negative photosensitive material layer for ink channel formation, on a substrate bearing thereon said energy generating element;
• pattern exposing said first photosensitive material layer for forming the ink channel;
• forming, on said first photosensitive material layer, a second negative photosensitive material layer of an average molecular weight larger than that of said first photosensitive material layer;
• pattern exposing said second photosensitive material layer for forming the ink discharge opening;
• and
• developing said first photosensitive material layer and said second photosensitive material layer.

A method for producing a liquid-discharging recording head including an ink discharge opening, an ink channel communicating with said ink discharge opening, and an energy generating element provided corresponding to said ink channel and adapted for generating energy to be utilized for ink discharge, comprising the steps of:

• forming a first negative photosensitive material layer for ink channel formation, on a substrate bearing thereon said energy generating element and provided therein with an ink supply opening;
• pattern exposing said first photosensitive material layer for forming the ink channel;
• forming, on said first photosensitive material layer, a second negative photosensitive material layer containing a larger amount of photopolymerization initiator than in said first photosensitive material layer;
• pattern exposing said second photosensitive material layer for forming the ink discharge opening;
• and
• developing said first photosensitive material layer and said second photosensitive material layer.

A method for producing a liquid-discharging recording head including an ink discharge opening, an ink supply opening, an ink channel communicating with said ink discharge opening and said ink supply opening, and an energy generating element provided corresponding to said ink channel and adapted for generating energy to be utilized for ink discharge, comprising:

• A) a step of forming a first negative photosensitive material layer composed of an uncrosslinking resist on a substrate bearing thereon said energy generating element, pattern exposing said first photosensitive material layer for forming the ink discharge opening and the ink channel along said energy generating element, and developing said first photosensitive material layer, thereby dissolving and removing said first photosensitive material layer except for portions corresponding to said ink discharge opening and said ink channel;
• B) a step of laminating a second photosensitive material layer composed of a thermally crosslinkable positive resist on the substrate bearing thereon said portions corresponding to the ink discharge opening and the ink channel, thermally crosslinking said second photosensitive material layer, and pattern exposing said layer for forming the ink supply opening by an ionizing radiation;
• and
• C) a step of developing and removing the uncrosslinked resist corresponding to the ink channel and the ink discharge opening, and the latent image formed for the pattern exposure for forming the ink supply opening;
• wherein said steps A, B and C conducted in successive order.